第21卷第10期 2013年10月
文章编号
1004-924X(2013)10-2566-08
光学精密工程
Optics and Precision Engineering
Vol.21No.10
Oct.2013
悬浮转子式微陀螺的反电动势转速检测
俞睿"，张海峰1*，刘晓为1,2
（1.哈尔滨工业大学MEMS中心，黑龙江哈尔滨150001；
2.微系统与微结构制造教育部重点实验室，黑龙江哈尔滨150001)
摘要：根据液浮转子式微陀螺闭环驱动系统对转子转连测量的需求，提出了一种适用于悬浮转子式微陀螺的反电动势转速检测方法。根据楞次定律，永磁转子在附有检测线圈的定子中转动时，会切割磁感线感应出反电动势。对反电动势信号进行分析，即可测得转子的转速。由于检测线圈与驱动线圈共用定子铁芯，这种检测方法在降低定子结构复杂度的同时，也引人了矩形波驱动信号带来的毛刺干扰。干扰信号经过模拟低通滤波器衰减后，通过模数转换器转换为数字信号。该信号通过单片机上运行的过零检测算法处理后，即可得到当前转子的转速。测试结果表明，该转速检测系统在剧新率为4Hz、转速达到5000r/min以上时，测量值的相对误差在0.3%以内，其非线性误差为0.41%，能够满足对悬浮转子式微陀螺转速进行检测的要求。
关键调：微陀螺；悬浮转子；转速测量；反电动势；丧入式算法
中图分类号：TB934
文献标识码：A
doi; 10, 3788/OPE, 20132110, 2566
BackEMFspeeddetectionof suspendedrtormicrogyroscope
WENG Rui', ZHANG Hai-feng'', LIU Xiao-weil-2
(1.MEMSCenter，HarbinInstituteofTechnology，Harbin150001,China 2.KeyLaboratory of Micro-systemsand Micro-structuresManufacturing
of theMinistryofEducation，Harbin150001China) Correspondingauthor,E-mail:moonzhf163.com
Abstract: On the basis of requirements of the closed-loop driving system in a liquid suspended rotor gyroscope for measurement of rotor speeds, a Back-electromotive Force (EMF) rotating speed detec tion method is proposed for the suspended rotor gyroscope. As induction coils work on Lenzs law, the rotating speed of rotor can be measured by detecting the back-EMF generated by a permanent magnet ism (p-m) rotor. Because the detecting coil and driving coil share the same stator core, this method reduces the complexity of the stator, but also introduces a burr interference from the driving rectangu-lar wave. The interference signal is then attenuated by an analog low-pass filter and sampled by an A/ D converter. Finally, the rotating speed of rotor can be calculated automatically by using a Micro-con troller Unit (MCU) and the zero crossing detection algorithm. The test results show that the relative
收稿日期：2013-05-23；修订日期：2013-07-03
基金项目：国家重大科学研究计划资助项目（No.2012CB934104）；国家自然科学基金资助项目（No.61071037）；哈尔
滨工业大学科研创新基金资助项目（No.HIT，NSRIF.2014040）