第18卷
第9期
2010年9月
文章编号
1004-924X(2010)09-2022-06
光学精密工程
Optics and Precision Engineering
谐振式MEMS温度传感器设计
马洪宇，黄庆安，秦明
（东南大学MEMS教育部重点实验室，江苏南京210096）
Vol, 18No.9 Sep.2010
摘要：为了实现以频率输出为信号的气象温度测量，提出了一种基于双层悬臂梁的谐振式微温度传感器。基于双悬臂架不同材料热膨胀系数的差异会导致悬臂梁谐振频率偏移的原理，采用压电方式同时实现悬臂梁的驱动及其谐振频率的检测，从而实现温度的测量。根据硅基传感器的正面腐蚀工艺，设计了谐振悬臂渠的双层结构，采用有限元方法分析了悬臂梁的谐振模态、可利用的振型及其温度与各模态谐振频率的关系，并利用多普勒振动系统对悬臂架的谐振特性进行了研究。实验发现悬臂梁的二阶弯曲振型Q值相对于其它振型是最大的，其Q值约为150；高阶振型特别是二阶弯曲振型适合用于以ZnO为压电材料的温度传感器的频率检测，并且具有相对较高的灵敏度（约为20Hz/C)和频率温度系数（1.9X10-*/C），结果表明，微型温度传感器能够满足气象温度检测的要求，并具有抗干扰能力强、灵敏度高、信号传输接口简单等优点。
词：温度传感器；微机电系统(MEMS)；频率测量；谱振；悬臂梁
关
键
中图分类号：TP212.11
文献标识码：A
doi;10.3788/OPE,20101809.2022
DesignofresonantMEMStemperaturesensor
MAHong-yu,HUANGQing-an,QINMing
(KeyLaboratoryof MEMSof theMinistry of Education,SoutheastUniversity,Nanjing 210096,China) Abstract:In order to realize meteorologic temperature measurement based on frequency outputs,a resonant micro-temperature sensor with a bilayer cantilever was proposed. According to the working principle that the resonant frequency of the microcantilever will be shifted due to the thermal expan-sion coefficient mismatch between the two-materials, the temperature variation could be detected by driving the cantilever. and detecting the resonant frequency with piezoelectric excitation and detection. The structure of the temperature sensor was designed according to the front side fabrication process of silicon. Then, the resonant modes, detectable models and the effect of temperature on these models were analyzed by means of finite element method. The resonant characteristics were also researched with a polytech laser Doppler vibrometer. The results indicate that the 2nd resonant model of the can tilever has the largest Q factor about 15o as compared with other resonant models. Furthermore, the higher mode, particularly the 2nd resonant model is more suitable for detecting the resonant frequency of the temperature sensors by utilizing ZnO as piezoelectric materials and it can offer a relative higher sensitivity about 2o Hz/C and temperature coefficient of frequency about 1. 9 X 1o-*/C.These re-sults show that the sensor can satisfy the requirements of meteorologic temperature measurement and
收稿日期：2010-03-08；修订日期：2010-04-05.
基金项目：国家863高技术研究发展计划资助项目（No.2009AA04Z322)；国家自然科学基金资助项目（No.
60901009)