第19卷第12期 2011年12月
文章编号
1004-924X(2011)12-2884-07
光学精密工程
Optics and Precision Engineering
Vol.19No.12
Dec. 2011
离子束溅射制备“日盲”紫外诱导透射滤光片
邓文渊*，金春水
（中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室，吉林长春130033）
摘要：对”日盲"紫外诱导透射滤光片进行了理论设计与分析，并分别优化了离子束溅射法况积ZrO；，SiO和AI薄膜的工艺。利用反射与透射光谱反演获得了ZrO，和SiO；薄膜的光学常数，并由JGS1/SiO,/Ai/SiO,/air(SAS)样品的变角度椭偏光谱反演精确获得了AI薄膜的光学常数。在此基础上，采用离子束溅射况积方法并利用上述3种薄膜材料优化
值透过率大于60.0%，透过峰带宽（FWHM)约为13nm，在300~350nm波段的截止度达到了2.6OD。研究认为制约离子束溅射制备“日盲"紫外诱导透射滤光片性能的主要因素是AI金属膜的溅射沉积速率以及沉积A1膜时腔体中残余的0：含量。
关键调：离子来减射；“日官"紫外诱导造新滤光片；ZrO；新射率；消光系数；糖偏光谱
中图分类号：0484.4
文献标识码：A
doi;10.3788/OPE.20111912.2884
Fabricationofsolar-blindinducedtransmissionfilters
byion-beamsputteringmethods
DENGWen-yuan',JINChun-shui
(StateKeyLaboratoryof AppliedOptics,ChangchunInstituteof Optics,
Fine Mechanics and Physics, Chinese Academy of Sciences,Changchun 130033,China)
*Corresponding author,E-mail:dwylo1@yahoo.com.cn
Abstract: Solar-blind UV induced Transmission Filters (SBU-ITFs) were fabricated by ion-beam sput-tering. Firstly, SBU-ITFs were designed and analyzed theoretically, and the deposition of ZrO;, SiO, and Al films by ion beam sputtering was optimized. The optical constants of ZrO, and SiO, films were derived from the transmitting and reflecting spectra, and the optical constant of Al film was deter-mined by the inversion of the variable incidence ellipsometric spectrum of a sample JGS1/SiO,/Al/ SiO, /air(SAS). On the basis of the research, the SBU-ITFs were fabricated by using the three films a bove and their optical properties were measured. The measurement for SBU-ITFs shows that the peak transmittance of the filter at the 264 nm center wavelength is larger than 6o%, the transmittance band width (FWHM) is about 13 nm, and the optical density in the 300350 nm cutoff spectral region rea-ches to 2. 6. The analysis of the transmittance shows that the main factors affecting the properties of SBU-ITFs are a slower deposition speed for Al film and smaller amount of Og contents remaining in
收稿日期：2011-02-18；修订日期：2011-05-26. 基金项目：国家重大科技专项资助项目