第4期
第23卷 2015年4月
1004-924X(2015)04-1034-10
文章编号
光学精密工程
Optics and Precision Engineering
Vol. 23No. 4
Apr.2015
三乙醇胺在镁铝尖晶石固结磨料研磨中的作用
王占奎1，2，朱永伟1*，朱琳，王建形
（1.南京航空航天大学机电学院江苏南京210016； 2.河南科技学院机电学院，河南新乡454003）
摘要：探索了三乙醇胺在镁铝尖晶石固结磨料研磨中的作用机理并进行了系列实验。首先，通过显微压衰实验测量了三
。然后，采用X射线光电子能谱仪(XPS)分析了三乙醇胺的化学作用
乙醇胺和去离子水作用下镁铝尖晶石样品的硬度。
机理，研究了在三乙醇胺和去离子水作用下工件表而层化学组分随深度的变化，估算了其表面软化层的厚度。最后，通过研磨实验探索了去离子水和不同浓度的三乙醇胺对材料去除率和表面质量的影响。结果表明：三乙醇胺研磨液对工件的化学作用降低了其表面层的显微硬度，形成了软化层；三乙醇胺和去离子水形成软化层的机制是其中的OH-和吸附的CO，与尖晶石基体发生了反应，面三乙醇胺形成的软化层厚度约为2nm，去离子水形成的软化层厚度小于0.65 nm；采用三乙醇胺研磨液的材料去除率高于采用去离子水，但表面质量较采用去离子水的差。实验证明，三乙醇胺对工件的化学作用可以显著地提高材料去除效率。
关键调：三乙醇胺；尖晶石；固结廖料；研磨；款化层
中图分类号：O786;TN305.2
文献标识码：A
doi:10.3788/OPE,20152304.1034
Effect oftriethanolamine inlapping spinel usingfixed abrasivepad
WANG Zhan-kui-2, ZHU Yong-wei'', ZHU Lin', WANG Jian-bin'
(1.Collegeof Mechanical and Electrical Engineering,
NanjingUniversityofAeronauticsandAstronautics,Nanjing210016,China;
2.School of Mechanical and Electrical Engineering,
Henan Institute of ScienceandTechnology，Xinriang454003,China)
Correspondingauthor,E-mail:meeywzhu@nuaa.edu.cn
Abstract: The action mechanism of triethanolamine in lapping spinel wafers using a fixed abrasive pad was investigated,and a serial of experiments were carried out. Firstly,micro indentation experiments were conducted to measure the hardnesses of spinel wafers soaked in triethanolamine solution and de ionized water. Then an X-ray photoelectron spectrometer (XPS) was employed to analyze the chemical mechanism of triethanolamine and to research the changes of chemical composition on wafers surface layer with etching depth increasing. Furthermore, the softened layer thicknesses affected by triethanolamine solution and de-ionized water were estimated.Finally, the influences
of
triethanolamine solution and de-ionized water on the material removal rate and surface quality were discussed by a lapping experiment using the fixed abrasive pad. Experimental results indicate that the
收稿日期：2014-06-07；修订日期：2014-07-20.
基金项目：国家自然科学基金资助项目（No.51175260，No.50905086)；江苏省普通高校研究生科研创新计划资助项
目（No.KYLX_0229）；河南省高等学校重点科研项目（No.15A46004)，航空科学基金（No.2014ZE52055）