第18卷
第1期
2010年1月
号1004-924X(2010)01-0060-09
文章编号
光学精密工程
Optics and Precision Engineering
掠入射X射线散射法测量超光滑表面
王永刚1-2,孟艳丽1.2.3,马文生1，陈斌"，陈波"
（1.中国科学院长春光学精密机械与物理研究所，吉林长春130033；
2.中国科学院研究生院，北京100039； 3.东北师范大学物理系；吉林长春130033）
Vol.18No. 1
Jan.2010
选择3片不同粗精度的硅片作为实验样品，根据一级矢量微扰理论对各个样品所测量的散射分布进行处理。结果表明， GXRS法得到的样品功率谱密度函数(PSD)与使用原子力显微镜(AFM)所测量的结果基本相符，分析了探测器接收狭缝的宽度和入射光发散度对实验结果的影响，结果表明，在其他实验条件理想的情况下，当探测器接收狭缝宽度<0.02 mm，人射光发散度<43"时，在空间频率>0.03μm"的范围内，由其引起的PSD函数测量误差<2%。随着操测器接收狭缝宽度和人射光发散度的减小，测量误差呈指数迅速减小。在所测量的空间频率范围内，PSD函数的误差随频率的增加而减小，仪器的重复精度优于2.6%。
关键词：掠入射X射线数射法；超光滑表面；微扰理论；功率谱密度（PSD)；原子力显微镜(AFM)；系统误差
中图分类号：0434.19；0433.4
文献标识码：A
Measurementofsuper-smoothsurface bygrazingX-ray scatteringmethod
WANG Yonggangl",MENG Yan-lil-2-3,MA Wen-sheng', CHEN Bin', CHEN Bo"(1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Changchun 130033,China;2.Graduate University of Chinese Academy of Sciences,Beijing 100039,China
3.PhysicsDepartment,NortheastNormalUniversity,Changchun130033,China)
Abstract: This paper introduces the measurement principle of a super-smooth surface by a Grazing X-ray Scattering(GXRS) method and an experimental facility based on an improved X-ray diffractome ter. By using three kinds of wafers with different roughnesses as samples,the scattering distribution of the samples are treated by first-order vector perturbation theory. The results indicate that the cal-culated Power Spectral Density (PSD) by GXRS is in a good agreement with the results obtained from Atomic Force Microscope (AFM). It also analyzes the effects of the slit width of a detector and the di-vergence of incidence X-ray on experimental results,results show that when the slit width is O. 02 mm and the incidence divergence is 43°,the errors are both lower than 2% in the range of spatial frequency higher than 0. o3 μm'1. It is concluded that the measuring errors decrease quickly with the reduces of
收稿日期：2009-06-04；修订日期：2009-07-23.
基金项目：国家自然科学基金资助项目（No.40774098;No.10878004)