第18卷第1期 2010年1月
文章编号
1004-924X(2010)01-069-06
光学精密工程
Optics and Precision Engineering
使用红外于涉仪测量非球面面形
贺俊1-2，陈磊1
（1.南京理工大学电子工程与光电技术学院，江苏南京210014； 2.中国兵器工业集团南京北方信息产业集团，江苏南京210022）
Vol.18No.1 Jan2010
摘要：提出用红外干涉仪在长波工作(入=10.6μm)的优点检测非球面面形。首先，通过移相算法，使用泰受型红外干涉仪测量出非球面与标准拟合球面之间的波像差：然后，根据非球面的失高方程计算出非球面与标准拟合球面之间波像差的理论值，通过比较这两个值，计算出非球面的面形偏差。实验结果表明，使用红外干涉仪测量的非球面与标准拟合球面之间的波像差为8.64μm(PV)，与理论波像差（8.11μm)比较接近，测得非球面面形偏差为1.20μm(PV)。为了验证这一方法的准确性，使用计算全息图(CGH)作为补偿镜在可见光干涉仪上测量了同一块非球面，两者测量结果比较明
合。结果表明，此方法有比较强的通用性，可以用于非球面在加工过程中的测试。关键调：光学测量；非球面；红外干涉仅；波像差
中图分类号：TN216;TH744.3
文献标识码：A
Measurementofasphericsurfacesbyinfraredinterferometer
HE Jun'-,CHEN Lei
l.Institute of Electronic Engineering&Photo-electric Technology, NanjingUniversity of Science&Technology,Nanjing210014,China;
2.NanjingNorthInformation Industrialization Group Corporation,Nanjing21o022,China) Abstract: The aspheric surfaces are measured by an infrared interferometer with a long working wave length (入=1o. 6 μm). By using the phase-shifting infrared interferometer, the wavefront aberration between aspheric wavefront and reference spherical wavefront is measured. Then, the theoretical val ue of the wavefront aberration is computed based on the aspheric surface equation. Finally, the sur-face deviation of tested asphere is obtained by subtraction of the theoretical wavefront aberration from the measured one. Experimental results show that the measured wavefront aberration is 8. 64 μm(PV), which is close to the theoretical wavefront aberration(8. 11 μm) . Furthermore, the aspheric surface deviation is 1. 2o μm(PV). In order to verify the accuracy of this method, the same asphere is measured by using a Computer Generated Hologram(CGH) method,and the results show that the two methods are coincident well. It is concluded that the method has advantages of easy operation and
good flexibility and can meet the measurement requirement of the aspheric surface manufacture. Key words: optical measurement; aspheric surface; infrared interferometer; wavefront aberration
收日期：2009-04-14；修订日期：2009-06-19.
基金项目：国家教育部博士点基金资助项目（No.20070288010）；兵器预研支撑基金项目（No.62301110116）