第20卷第4期 2012年4月
文章编号1004-924X(2012)04-0727-06
光学精密工程
Optics and Precision Engineering
Vol, 20No. 4
Apr,2012
接触式大型非球面镜面形测量中测量点分布的确定
李杰1,2，，伍凡1，吴时彬"，匡龙"，林常青！
（1.中国科学院光电技术研究所，四川成都610209：2.中国科学院研究生院，北京100049）
摘要：为准确有效地检测大型非球面光学元件的面形，研究了接触式测量光学元件的测量点分布方式。使用不同密度的径向分布及均勾分布的测量点分别对以不同Zernike多项式表示的面形偏差进行采样，然后计算采样所得面形相对给定面形PV值及RMS值的最大相对误差，并对计算结果进行了分析。对1.8m抛物面镜面形实测结果表明；在镜面加工
及初抛阶段，面形偏差主要为像散或其它非对称面形偏差，测量点均匀分布是提升测量精度的有效手段。此分析方法可
以指导测量点的排布方式，从而确保由测量点分布引人的测量误差小于镜面本身面形误差的1/5，提高检测效率，关键调：光学面形检测；非球面；接触式测量；测量误差，Zernike多项式
中图分类号：TQ171.65
文献标识码：A
doi;10.3788/OPE,20122004,0727
Determination of measurementpointdistributionfor contact
measurementoflargeasphericmirrorsurface LI Jiel-·,WU Fan',WU Shi-bin',KUANG Long',LIN Chang-qing
(1.InstituteofOptics&Electronics,ChineseAcademy of Sciences,Chengdu610209,China;
2. Graduate University of Chinese Academy of Sciences,Beijing 100049,China)
*Correspondingauthor,E-mail:newuser9919@ohu.com.cn
Abstract: Measurement point distribution in contact measuring large aspheric cptical surface was re-searched. By the radial and uniform measurement points with different density distributions, various surface deviations represented by different Zernike polynomials were sampled respectively. Then, the maximum PV and RMS errors were calculated and analyzed, Measurement results of a 1. 8 m parabolic mirror were taken as examples, and it indicates that the low density radial measurement point distri-bution can meet the measurement needs at the forming and coarse grinding stages because the surface deviations show large rotate-symmetrical forms. Moreover, the uniform distribution of measurement points is an effective way to improve measurement accuracy at fine grinding and initial polishing sta-ges, for the main surface deviations are astigmatism or other asymmetrical aberrations. This method can guide the measurement point distribution, control the measurement error caused by distribution to be less than 1/5 of surface error, and can improve measurement accuracy efficiently.
Key words: optical surface testing; aspheric surface;contact measurement; measurement error; Zerni-
ke polynomial
收稿日期：2011-09-14；修订日期：2011-12-08.
基金项目：国家自然科学基金资助项目（No.60838002)