
第23卷第12期 2015年12月
1004-924X(2015)12-3422-08
文章编号
光学精密工程
Optics and Precision Engineering
基于正交与插值算法的
精密抛光平台综合误差建模与补偿
张恩忠1.2,赵继1·,冀世军1,李刚2
Vol.23
No.12
Dec.2015
(1.吉林大学机械科学与工程学院,吉林长春130022;2.长春工业大学机电学院,吉林长春130012)摘要:为了提高四轴抛光平台的加工精度,本文针对以气浮平台和旋转台为主要运动方式的四轴抛光平台进行了几何与热综合误差建模与补偿研究。采用激光干涉仪、温度传感器等测量仪器分别对平台X、Z轴在不同温度下的定位误差进行重复测量与分析,证实了不同进给速度对定位误差没有显著影响。得到了四轴抛光平台X、Z轴的定位误差与温度之间的变化规律。基于正交多项式和插值算法分别建立了X、Z轴的几何与热综合误差模型。根据综合误差模型计算出预测数据曲线,并分别对X、Z轴的7组实验数据进行了数据拟合,拟合残差绝对值均不超过0.2μm。依据预测数据进行了补偿实验。结果显示,补偿后四轴抛光平台在常温下、温升(60min)下和稳态下的Z轴定位误差分别降低了 93.05%、92.45%、85.71%,X轴定位误差分别降低了89.28%、93.59%、93.33%,实验结果证明本文所提出的综合模型及补偿方法精度高,鲁棒性好。
关键词:抛光机床;正交多项式:插值算法;综合误差模型;误差补偿
中图分类号:TH703;TN305.7
文献标识码:A
doi;10.3788/OPE,20152312.3422
Comprehensiveerrormodelingandcompensationfor
precision polishingplatform based on orthogonal experiment
andinterpolationalgorithm
ZHANGEn-zhong'-2,ZHAO Jil',JI Shi-jun',LIGang
(1.Collegeof Mechanical Science andEngineering,JilinUniversity,Changchun130022,China; 2.School of Mechatronic Engineering,Changchun Uniersity of Technology,Changchun 130012,China)
*Correspondingauthor,E-mail.jzhao@jlu.cdu.cn
Abstract: To improve the machining precision of four-axis polishing platforms, a geometric and ther-mal comprehensive error model and an error compensation method were researched for a four-axis pol ishing platform with a float platform and a rotation platform. Several kinds of instruments such as la ser interferometer, temperature sensor were used to repeatedly measure and analyze respectively the positioning errors of X,Z axes at different temperatures and to verify that different feeding speeds were no significant influence on the positioning error. The change rules of between position error and temperature change for the polishing platform in X,Z axes were obtained, Based on orthogonal poly
收稿日期:2015-06-30;修订日期:2015-08-16
基金项目:国家973重点基础研究发展计划资助项目(No.2011CB706702)