第20卷第3期
2012年3月文章编号
1004-924X(2012)03-0550-06
光学精密工程
Optics and Precision Engineering
Vol.20No.3
Mar.2012
适用于恶劣环境的MEMS压阻式压力传感器
伞海生1.2*，宋子军1，王翔"，赵燕立"，余煜玺3
（1.厦门大学物理与机电工程学院机电工程系，福建厦门361005 2.厦门大学萨本栋微纳米技术研究院微机电中心，福建厦门361005
3.厦门大学材料学院材料科学与工程系，福建厦门361005）
摘要：为了消除潮湿、酸碱、静电颗粒等恶劣环境对压力传感器压敏电阻的影响，提出了种新型结构的压阻式压力传感器。该传感器将压敏电阻置于应力薄膜的下表面并通过阳极键合技术密封在真空压力腔中，从面减少了外界环境对压数电阻的影响。介绍了此种压力传感器的工作原理，使用ANSYS软件并结合有限元方法模拟了压敏薄膜在压力作用下的应力分布情况，最后，利用微机电系统（MEMS)技术成功制作出了尺寸为1.5mmX1.5mmX500um的压阻式压力传感器。用压力检测平台对该压力传感器进行了测试，结果表明，在25～125℃，其线性度小于2.73%，灵敏度约为20 mV/V-MPa,满足现代工业使用要求。
关键调：微机电系统；压阻式压力传感器；悉劣环境；可靠性
中图分类号：TP212.12
文献标识码：A
doi;10.3788/OPE.20122003.0550
Piezoresistivepressuresensorsforharshenvironments SAN Hai-sheng I,2·,SONG Zi-jun',WANG Xiang',ZHAO Yan-li',YU Yu-xi
(l.Departmentof Mechanical and Electrical Engineering,Schoolof Physical and Mechanical &
ElectricalEngineering，XiamenUniversity，Xiamen361005,China
2.MEMSCenter,PenTungSahMicro-NanoTechnologyInstitute,XiamenUniversity,
Xiamen361005，China;3.DepartmentofMaterialScienceandEngineering
CollegeofMaterials,XiamenUniversity，Xiamen361005,China)
Correspondingauthor，E-mail:sanhs@rmu.edu.cn
Abstract: To increase the stabilization and reliability of piezoresistive pressure sensors working in harsh environments with harsh acids, alkalis, corrosive salts,and other destructive substances such as electrostatic particles and damp, a novel piezoresistive pressure sensor was presented. The innova-tion of the sensor was that the sensing elements of the sensor were fabricated in the lower surface of a silicon diaphragm and were sealed in a vacuum pressure cavity by silicon-glass bonding process. The work principle of this pressure sensor was introduced. Then, Finite Element Method and ANSYS soft were used to simulate the stress distribution of the diaphragm.Finally,the micro-electro-mechanical System(MEMS)technologywasused tofabricateapressuresensor with the dimension of 1.5mmX
收稿日期：2011-10-21；修订日期：2011-11-24.
基金项目：国家自然科学基金资助项目（No.51075344;No.51175444)