第18卷第3期 2010年3月
文章编号，1004-924X(2010)03-0563-07
光学精密工程
Optics and Precision Engineering
拼接镜主动光学共焦实验林旭东1,2，陈涛，王建立，杨飞1，张景旭，明名"，张丽敏，陈宝刚"，李宏壮"，王富国1.2
（1.中国科学院长春光学精密机械与物理研究所，吉林长春130033；
2.中国科学院研究生院，北京100039）
Vol.18No.3 Mar.2010
摘要：为了实现对拼接镜的共焦调整，建立了拼接镜主动光学共焦实验系统。实验中，拼接镜由3块对边长300mm的正六边形子镜组成，子镜为球面，曲率半径为2000mm。采用Shack-Hartmann传感器进行共焦测量，用6个微位移平移台对两块子镜的离焦和倾斜进行调整。每个子镜对应Shack-Hartmann传感器的36个子孔径，用子孔径产生的像点位置偏移计算子镜之间的共焦误差。通过微位移平台调整，可控制子镜的轴向离焦误差优于1umrms，倾斜误差在两
维方向上均优于0.02”rms。实验表明，该方法适用于大型拼接镜面望远镜的共焦标定和实时调整。关键调：拼接镜：共焦；Shack-Hartmann传感器
中图分类号：TH751TH703
文献标识码：A
Co-focusexperimentofsegmented-mirroractiveoptics LIN Xu-dong'-,CHEN Tao',WANG Jian-li',YANG Fei',ZHANG Jing-xu',
MING Ming',ZHANG Li-min', CHEN Bao-gang', LI Hong-zhuang',WANG Fu-guo'-2
(l.Changchun Institute of Optics,FineMechanics and Physics,
ChineseAcademyofSciences,Changchun130033,China;
2.GraduateUniversityof ChineseAcademyofSciences,Beijing100039,China)
Abstract: A co-focus experiment system of segmented-mirror active optics is built to realize the co-fo-cus fine-tuning of a segmented-mirror. In this system, the segmented-mirror consists of three hexa gonal submirrors with 300 mm side to side, and the shape of each submirror is spherical with 2 000 mm radius. A Shack-Hartmann sensor is used for co-focus measurement, and six micro-displacement translation stages in this system are used for adjusting the co-focus and tilt of the two sub mirrors. Each sub-mirror corresponds to 36 sub-apertures of the Shack-Hartmann sensor,and the co-focus er-rors can be calculated by the position deviation of the spots formed by the sub-apertures. After fine tuning for micro-displacement translation stages, the rms de-focus error in the optical axis direction and the rms tilt errors in two orthogonal dimentions of the sub mirror can be controlled to less than 1 μm and o. 02",respectivelly. The experiment shows that the method used in this system is also com-
收稿日期：2009-08-27；修订日期：2009-09-17 基金项目：中国科学院三期创新工程资助项目