第18卷
第1期
2010年1月
文章编号
1004-924X(2010)01-0075-08
光学精密工程
Optics and Precision Engineering
球面拼接镜的相对曲率半径测量林旭东1,2，陈涛1，明名，王建立，陈宝刚，董磊（1.中国科学院长春光学精密机械与物理研究所，吉林长春130033：
2.中国科学院研究生院，北京100039）
Vol.18No. 1
Jan.2010
Hartmann传感器和高精度球径仪测量球面子镜相对曲率半径的新方法，并建立了一个实验系统。该方法首先使用共焦调整方法使各子镜共焦，用SH传感器测量子镜的轴向离焦量，轴向调整压电陶瓷促动器，使由传感器测得的离焦量接近于0；最后，再对子镜进行一次共焦调整之后，使用高精度球径仪来测量各子镜之间的相对曲率半径差。实验采用的拼接镜由3块对边长300mm的正六边形子镜组成，子镜为球面，设计曲率率径为2000mm。分析测试结果表明，该方法测得的球面拼接子镜的相对曲率半径精度约为1um，该方法表明适用于大型球面拼接镜面望远镜各子镜相对曲率半
径的检测。关键
调：天文望远镜；拼接镜；相对曲率车径；Shack-Hartmann传感器；球径仅
中图分类号：TH751
文献标识码：A
Measurementofrelativecurvatureradiusfor
spherical segmentedmirrors
LIN Xu-dong'-,CHEN Tao', MING Ming', WANG Jian-li', CHEN Bao-gang', DONG Lei
(l.Changchun Institute of Optics,Fine Mechanics and Physics
Chinese Academy of Sciences,Changchun 130033,China;
2.GraduateUniversity of ChineseAcademy of Sciences,Beijing100039,China
Abstract: With the aim to measure the relative curvature radius between the two segments in spherica segmented mirrors and to improve thematching accuracy of segments, a new method utilizing a Shack Hartmann sensor and a high precision spherometer to measure the relative radius of each spherical seg ment is presented and an experiment system is also setup. The method firstly uses a co-focus tech nique to co-focus each segment; then uses the S-H sensor to measure the defocus in the optical axis di-rection and employs a PZT actuator behind the segments to make the defocus near zero. After the same co-focus process is undertaken again, the relative radius of each segment can be measured by the high precision spherometer. In the experiment, the segmented mirror consists of three spherical hexa gonal segments with an opposite side of 300 mm and a curvature radius of 2 o00 mm. The analysis and experiment indicate that the precision of the method is about 1 μm, which shows that the method is
收稿日期：2009-02-24；修订日期：2009-05-19
基金项目：中国科学院三期创新工程基金资助项目