第18卷第6期 2010年6月
文章编号
1004-924X(2010)06-1309-10
光学精密工程
Optics and Precision Engineering
Vol.18No.6 Jun.2010
三维微细电解铣削加工的实时控制与检测
刘勇，曾永彬，朱荻，黄绍服，王少华（南京航空航天大学机电学院，江苏南京210016）
摘要：为了实现三维微细电解铣削加工过程的实时监测，建立了基于Labwindows/CVI软件平台的控制与检测系统。对该系统所采用的三维轨连生成及控制策略，数据采集及抗干扰算法，加工时间误差补偿算法等进行了研究。首先，根据微细电解铣削加工的特点，分析了加工控制与检测系统的需求，接着，搭建了高精度的三维微细铣削加工实验硬件平台。然后，利用虚拟仪器平台建立了基于分层铣副加工方式的三维轨连进给控制模块，并对刀具执迹的优化进行了讨论。最后，介绍了数据采集及反馈控制模块以及实时控制的时间补偿函数。基于上述控制与检测系统，实验并成功加工出了单层尺寸为15μm×55μm×15μm的三层阶梯结构，结果表明，本系统可以满足微细电解铣加工的高精度、快响
应、稳定可靠等要求。关健
词：微细电解铣制加工；Labwindows/CVl;分层镜剂；数据采集；反馈控制
中图分类号：TG662
文献标识码：A
doi;10.3788/OPE,20101806.1309
Real-timecontrolanddataacquisitionsystemfor
3Dmicroelectrochemicalmilling
LIU Yong, ZENG Yong-bin, ZHU Di,HUANG Shao-fu,Wang Shao-hua(College of Mechanical Electrical Engineering,Nanjing University of
AeronauticsandAstronauticsNanjing210016,China)
Abstract: In order to realize the real-time control and detection of three-dimensional micro electro chemical milling process, a data acquistion and control system is established based on virtual instru ment software Labwindows/CVI. The three-dimensional tool path generation and control strategy, data acquisition and anti-jamming algorithm and the machining time error compensation.algorithm for the system are investigated. Firstly, the requirements of the control and detection system are analyzed according to the characteristics of micro electrochemical milling process and a high-precision experi-mental system for 3D micro electrochemical milling is buit up. Then, the feed control module for three-dimensional tool path is established based on a virtual instrument platform, and the optimization of tool path is discussed, Finally, the data acquisition and its feedback control module and the machi-ning time error compensation function are introduced. On the basis of the system above, a three-step staircase structure with one stair of 15 μm X 55 μm X 15 μm is fabricated successfully. It shows that the system can meet the requirements of micro electrochemical milling for high machining precision,
收稿日期：2009-10-09修订日期：2009-12-10.
基金项目：国家863高技术研究发展计划资助项目（2009AA04Z302)；国家自然科学基金重点项目（No.50635040）