第20卷
第5期
2012年5月
文章编号
1004-924X(2012)05-0996-06
光学精密工程
Optics and Precision Engineering
压电驱动器记忆特性迟滞非线性建模
张桂林，张承进：，赵学良
（山东大学控制科学与工程学院，山东济南250061)
Vol. 20No.5
May.2012
摘要：考虑压电驱动器固有的迟滞特性对驱动器定位精度的影响，提出了一种精确措述压电驱动器迟滞非线性特性的建模方法，根据遇滞曲线的运动规律，并且考虑迟滞曲线的记忆更新特性，新的遇滞数学模型修正了单纯采用抛物线拟合时的建模误差。为了验证模型的有效性，以PST150/7/40VS12型压电陶瓷驱动器为例进行了试验研究。研究显示，采用抛物线迟滞模型对一阶反转输人信号进行预测时，最大误差为0.1413μm，均方误差为0.0604μm，对复杂信号模型预测的最大误差为1.3960μm，均方误差为0.8566μm；采用修正后的模型对文中复杂信号建模时，最大误差为 0.2370μm，均方误差为0.09μm。实验结果表明，修正后的模型不仅能够满足遇滞曲线的运动规律，还能够满足迟滞
非线性的记忆更新特性，可以比较精确地描述复杂输入信号下的迟滞非线性特性。关键调：压电驱动器；滞非线性；建模；非局部记忆
中图分类号：TN384；TP391.9
文献标识码：A
doi;10.3788/OPE.20122005.0996
Modeling of nonlocal memory hysteresis in piezoelectric actuators
ZHANG Gui-lin, ZHANG Cheng-jin' , ZHAO Xue-liang
(School of ControlScience andEngineering,ShandongUniversity,Jinan250061,China）
+Correspondingauthor,E-mail:cjzhangsdu.edu.cn
Abstract: As piezoelectric actuators have poor position accuracy caused by their inherent hysteresis nonlinearities, this paper proposed a new modeling method to precisely describe their hysteresis phe-nomena. Based on the motion rules of hysteresis curves and the nonlocal memory property of the hys teresis nonlinearity, proposed model modified the modeling errors fitted by parabolic model. To verify the feasibility of the model, an experiment was performed by the PST150/7/40VS12 piezoelectric ac tuator. Experimental results indicate that for the first order reversal signal, the maximum error is 0. 141 3 μm and the mean-squared error (MSE) is 0. 060 4 μm by using the parabolic model. Howev-er, for a more complex signal, those of the parabolic model are 1. 396 0 μm and 0. 856 6 μm, respec-tively. When using the amended model to predict the actuator response under the above-mentioned complex signal, the maximum prediction error and the mean-squared error are 0. 237 0 μm and 0. 09 μm, respectively. These data demonstrate that the proposed model not only provides a minor-loop i-dentical property, but also offers the nonlocal property and it can precisely predict the hysteresis path for assigned complex input profiles.
Key words: piezoelectric actuator; hysteresis nonlinearity; modeling; nonlocal memory
收稿日期：2011-12-16；修订日期：2012-02-23.
基金项目：国家自然科学基金资助项日（No.61174044)；山东省自然科学基金资助项目（No，ZR2010FM016）