第24卷第5期 2016年5月
文章编号
1004-924X(2016)05-1112-06
光学精密工程
Optics and Precision Engineering
压电陶瓷驱动器的迟滞特性
范伟，林瑜阳，李钟慎
（华侨大学机电及自动化学院，福建厦门361021）
Vol.24No.5
May.2016
和机电耦合效应分析了迟滞的成因，分别对不同驱动行程，全行程不同位置和不同起始电压下的迟滞特性进行了对比实验。结果表明：对10V行程的驱动，随着电压区间的递增，平均位移输出先增大后减小，平均迟滞误差从0.4193μm减小到0.1589μm；对100V行程的驱动，随着起始电压的增大，平均位移输出从42.8825μm减小到25.92μm，平均迟滞误差从3.9993μm减小到1.6923μm起始电压每增加15V，位移输出减小5.6542μm，迟滞误差减小0.769μm。实验结果反映了电畴翻转状况对驱动过程机电耦合效率的影响，有效验证了电畸翻转理论。实验也表明：针对电畴翻转不同阶段所表现的的迟滞特征对压电陶瓷驱动器的迟滞误差进行补偿，可修正或减小迟滞误差带来的影响，为提高系统定位控制精度提供科学的参考依据。
关键词：压电陶瓷驱动器；达；电時制翻转；这滞特性曲线；定位控制
中图分类号：TN384
文献标识码：A
doi;10.3788/OPE.20162405.1112
Hysteresischaracteristicsofpiezoelectricceramicactuators
FAN Wei*,LINYu-yang,LIZhong-shen
(CollegeofMechanicalEngineeringandAutomation,HuaqiaoUniversity,Xiamen361021,China)
Correspondingauthor，E-mail:fanwei@hqu.edu.cn
Abstract: As the inherent hysteresis phenomena of a piezoelectric ceramic actuator affects its positioning accuracy badly, this paper analyzes and verifies the characteristics of the hysteresis phenomena. The causes of hysteresis were analyzed through microscopic polarization mechanism and electromechanical coupling effects. Some experiments were designed to compare the hysteresis characteristics under different travels, different positions of the whole travel and different initial voltages. The experimental results indicate that: for the driving travel of 1o V, the output of average displacement increases at first then decreases and the average hysteresis error decreases from 0. 419 3 μm to 0.158 9 μm as the increases of voltage intervals; for the driving travel of 100 V, the output of average displacement decreases from 42. 882 5 μm to 25. 92 μm and the average hysteresis error decreases from 3. 999 3 μm to 1. 692 3 μm as the increases of initial voltages. Moreover, when the initial voltage increases by 15 V,the output of displacement decreases by 5. 654 2 μm on average, and the hysteresis error decreases by O. 769 μm on average. These results reflect the influence of domain switching status in the initial phase on electromechanical coupling efficiency in the driving
收稿日期：2016-01-20；修订日期：2016-02-20.
基金项目：国家自然科学基金资助项目（No.51475176）;2013年福建省自然科学基金资助项目（No.2013J05077)；中
央高校基本科研业务费专项资金资助项目（No.11J0234)