第6期
第21卷 2013年6月
文章编号
1004-924X(2013)06-1503-07
光学精密工程
Optics and PrecisionEngineering
压电陶瓷微位移驱动器建模与控制
刘泊，郭建英，孙永全，
（哈尔滨理工大学测控技术与通信工程学院，黑龙江哈尔滨，150080）
Vol.21No. 6
Jun.2013
摘要：考虑利用白光干涉仪进行表面三维形貌测量时压电陶瓷(PZT)的端变效应对微位移驱动器位移精度的影响，提出了一种沿参考镜光轴方向提高该驱动器位移精度的方法。系统研究了该驱动器的位移检测回路、PID闭环控制以及蜗变补偿控制；利用光电位置传感器和光学杠杆调节位移检测回路，将压电陶瓷驱动器微位移反馈至控制系统，建立PID 闭环控制。充分考虑了PZT蝠变特性对测量过程的影响，建立了"电压蜗变"补偿模型，实现了基于PID闭环控制与螺变补偿控制相结合的复合控制方法。利用XL-80激光干涉仪测量压电陶瓷驱动器在PID闭环控制和复合控制二种情况下的微位移，实验结果显示前者位移误差为0.007μm，后者位移误差为0.005μm。结果表明该方法可有效克服压电
陶瓷迟滞非线性和蜗变对副量结果的影响，满足表面三维形貌测量的高精度要求。关键调：压电陶瓷；位移驱动器；PID闭环控制；电压嫣变补偿
中图分类号：TP273
文献标识码：A
doi;10.3788/OPE, 20132106. 1503
ModelingandcontrolforPZTmicro-displacementActuator
LIUBo,GUOJian-ying,SUNYong-quan'
(Collegeof MeasurementControl Technologyand CommunicationEngineering,
HarbinUniversityof ScienceandTechnology,Harbin150080,China)
Correspondingauthor,E-mail:sunyongquan@sina.com
Abstract: When a white light interferometer is applied to 3D surface microcosmic topographic meas urement, the measuring accuracy is effected by the hysteresis and creeping phenomenon generated by the piezoelectric actuator seriously. Therefore, this paper proposes a method to improve the displace-ment accuracy of the reference mirror along the optical axis direction. The piezoelectric actuator is giv en, and its displacement detecting circuit, PID closed loop control algorithms, and creep compensation control are studied. First, displacement detecting circuit is established by a position sensitive device and an optical lever, by which the piezoelectric ceramic micro-displacement can be fed back to control the system, then the PID closed-loop control algorithm is established. Furthermore, the creeping characteristics of piezoelectric ceramic is discussed during the measurement. In order to eliminate the creeping phenomenon and improve measurement accuracy, the “voltage creep" compensation model is proposed. Finally, an integer control system based on PID closed-loop control and creep compensation control is established. The micro-displacement of the piezoelectric actuator is measured by a high-pre cision XL-8o laser interferometer under the two cases of PID closed-loop control and integer control.
收稿日期：2013-01-29：修订日期：2013-03-15.
基金项目：国家863高技术研究发展计划资助项目（No.2009AA042407）