第20卷第11期 2012年11月
文章编号
1004-924X(2012)11-2444-06
光学精密工程
Optics and Precision Engineering
Vol.20No. 11
Nov,2012
调幅式电容位移传感器的峰值检波电路设计
黄向东*，刘立丰，谭久彬，马标
（哈尔滨工业大学超精密光电仪器工程研究所，黑龙江哈尔滨150001)
值保持电路的调幅式电容位移传感测量方法。首先，分析了调幅式电容位移传感器及其检测电路的工作原理，在研究调幅信号附加相移产生机理的基础上，提出了延迟反馈式峰值保持电路，用以去除附加相移对峰值解调的影响，然后，设
%00 传感器测量编差最大值为36nm。结果表明，采用延迟反馈型峰值保持电路有效地解决了系统不确定相移带来的峰值检波不准确的间题，所制作的电容传感器满足了高精度测量的要求，
关键调：位移传感器；电容传感器；延迟反馈：相位延迟；峰值检波电路
中图分类号：TP212.12
文献标识码：A
doi;10.3788/OPE, 20122011.2444
DesignofpeakdetectorcircuitforAM
capacitivedisplacementsensor
HUANG Xiang-dong *, LIU Li-feng, TAN Jiu-bin, Ma Biao
(Instituteof Ultra-precision Optoelectronic InstrumentEngineering
HarbinInstituteofTechnology,Harbin15000l,China) xCorrespondingauthor,E-mail:huangrd@hit.edu.cn
Abstract: To solve the problem of inaccurate peak demodulation resulted from the system uncertain phase shift in Amplitude Modulation (AM) for a capacitive displacement sensor, an AM capacitive displacement sensor based on an improved delayed feedback peak detector circuit was proposed and its applied functional blocks and circuits were investigated. Firstly, the measurement principles of the AM capacitive displacement sensor and its detection circuit were analyzed, Based on generation princi-ple of phase shift with the AM signal, an improved delayed feedback peak detector was presented a-gainst the probiem of inaccurate peak demodulation. Then, the AM capacitive displacement sensor was prototyped using printed circuit boards and its performance indicators were tested as well. Final-ly, experimental results and errors were discussed. It indicates that the linearity of the delayed feed-back peak detector circuit is better than 0. o5%, the data shift of prototyped sensor is less than 10 nm/30 min, and the maximum deviation of sensor is 36 nm within the measuring range of 0~25 μm.
收稿日期：2012-06-15；修订日期：2012-09-05
基金项目：国家自然科学基金（面上)资助项目（No.51075096)黑龙江省留学归国人员基金资助项目（No，LC201038/
40000045-6-1040001)