第19卷第9期 2011年9月
文章编号
1004924X(2011)09-2284-09
光学精密工程
Optics and Precision Engineering
Vol. 19No, 9
Sep.2011
利用三光束激光干涉仪评估纳米平台的移动性能
王世华”，陈秀玲，徐涂
（国家计量中心新加坡科技研究局，新加坡118221）
摘要：纳米位移传感器多集成在纳米平台的平行移动柔性机构中，通过闭环控制回路来实现纳米级的平台移动精度，本文介绍了利用具有亚纳米分辨率的三光束单频激光干涉仪校正纳米级电容式线性移动平台位移的工作，阐述了校正测试系统的布局以及线位移和角度位移的校正测试原理。通过实验成功地对移动线位移320μm的纳米平台进行了校正，实验数据表明，该平台的偏摆最大角位移为3.5”，另外，对该校正系统进行了测量不确定度分析，在覆盖因子2时，它的扩展不确定度为(1.8十1.23×10-L)nm，测试长度L的单位是μm，由此显示该系统可有效评价纳米单台的移动性能。
词调：电客式纳来平台；纳米位移传感器；激光干涉仪
关键
中图分类号：TH703;TH744.3
文献标识码：A
doi;10.3788/OPE,20111909.2284
Evaluationofnano-stagemovementbyusing
triple-beamlaserinterferometer WANG Shi-hua' ,TAN Siew-leng, XU Gan
(National Metrology Centre,Agency for Science,Technology and Research,Singapore 118221)
Corresponding author,E-mail,wang_shihuanmc.a-star,edu,sg
Abstract: Nanosensors are generally integrated into flexure translation stages to form a closed-loop feedback to control the movement of the stage accurately in a nano-scale order. To evaluate the dis placement of nano-stages, a calibration system based on a singie frequency triple-beam laser homodyne interferometer with a sub-nanometre resolution was developed to calibrate the precision of the linear nano-stage with a capacitive feedback sensor. The triple-beam configuration and its linear and angular measuring principles were described to reflect how the linear and angular displacements (yaw &. pitch) of the stage could be determined accurately. The experimental results demonstrate that the system is capable of calibrating the nano-stage with a linear displacement up to 32o μm and an angular deviation up to 3. 5". The error sources of the proposed calibration system were also highlighted in the measure ment uncertainty analysis,and it shows that the expanded uncertainty of measurement with a coverage factor k=2 is estimated as (1. 8+1. 23 X10 L) nm, where L is the displacement in μm. The results
Received date: 2011-03-08 ; Revised; 2011-0430.
Foundation item; Nanometrology Roadmap Funded by Ministry of Industry and Trade in Singapore