第22卷第2期 2014年2月
文章编号
1004-924X(2014)02-0338-08
光学精密工程
Optics and Precision Engineering
柔性铰链微定位平台的设计马立12*，谢炜，刘波，孙立宁2,3
Vol.22No.2
Feb.2014
（1.上海大学机电工程与自动化学院，上海200072;2.苏州大学机器人与微系统研究中心，江苏苏州215021；
3.哈尔滨工业大学机器人技术与系统国家重点实验室，黑龙江哈尔滨150080）
摘要：设计了一种以平行板铰链机构进行导向，以桥式机构进行位移放大的新型压电陶瓷驱动微定位平台。应用弹性力学和材料力学理论建立该平台的桥式放大机构和平行板较链机构的理论模型，分析了平台的驱动力、输出位移、刚度和固有频率，并运用Matlab软件优化了桥式机构铰链长度、厚度，平行板铰链长度及厚度等几何参数，获得了微定位平台的最优值。对优化后的结果进行了有限元仿真，并措搭建了测试系统对平台性能进行了测试。测试结果显示，理论分析与实验结果的最大误差为9.8%，有限元分析与实验结果的最大误差为4.2%，得到的结果验证了理论分析和有限元分析的正确性，实现了平台体积小，放大倍数高，位移输出大的设计目标。
关键词：微定位平台；桥式机构；平行板机构；柔性铰链；有限元分析；优化设计
中图分类号：TP242
文献标识码：A
doi:10. 3788/OPE. 20142202. 0338
Design of micro-positioning stage withflexurehinge
MA Lil-2,XIE Wei',LIU Bo',SUN Li-ning.s
(1.School of Mechatronic Engineering and Automation,Shanghai University,Shanghai 200072,China:
2.Robotics and Microsystems Center,Soochow University,Suzhou215021,China;
3.StateKey Laboratory of Robotics and System,Harbin Institute of Technology,Harbin 150080,China)
*Correspondingauthor,E-mail:malian@shu.edu.cn
Abstract: A micro-positioning stage driven by a piezoelectric ceramic is developed, which adopts a bridge-type flexure hinge mechanism to realize displacement amplification and uses a parallel board hinge mechanism to guide. Based on elastic mechanics and material mechanics, the theoretical models of bridge-type flexure hinge and parallel board hinge mechanisms are established and the driving force, output displacement, stiffness and natural frequency of the stage are analyzed. The Matlab software is used to optimize the geometric parameters, including the length and thickness of the bridge-type flex ure hinge, and those of the parallel board hinge, By which the optimized parameters are obtained. The micro-positioning stage after optimization is simulated by Finite Element Analysis(FEA) and a test system is constructed to measure the micro-positioning stage . The experimental results show that the largest error between theoretical analysis and experimental result is 9, 8%, and the largest error be tween FEA and experimental result is 4. 2%, which verifies the accuracy of theoretical analysis and
收稿日期：2013-10-11；修订日期：2013-11-20.
基金项目：国家自然科学基金资助项目（No，50905105)；上海市自然科学基金资助项目（No.13ZR1415800)；上海市
教育委员会科研创新资金资助项目（No.14YZ008）