第20卷第4期
2012年4月文章编号
1004-924X(2012)04-0719-08
光学精密工程
Optics and Precision Engineering
Vol.20No. 4
Apr,2012
数控非接触式超光滑光学元件加工机床的设计
李显凌*
（中国科学院长春光学精窑机械与物理研究所应用光学国家重点实验室，吉林长春130033）
摘要：基于数控技术，提出了一种非接触式光学元件表面超光滑液体抛光方法。通过磨头中心孔为抛光表面提供抛光液，驰光液在磨头自转的带动下与光学元件表面相互作用，实现光学元件表面材料的微量去除，利用计算机控制抛光磨头的运动轨迹完成对光学元件表面的抛光。根据上述原理，设计和研制了数控非接触表面超光滑光学元件加工机床样机，样机直线运动轴最低进给速度为0.0001m/s，定位精度为0.008mm；摆动轴最低转速为0.0028r/min，定位精度为 15。抛光实验结果表明，经过20min的超光滑加工，熔石英材质光学元件上两点的表面粗糙度R，值分别由加工前的 1.03nm和0.92nm提高到加工后的0.48nm和0.44nm，显著提高了加工精度。
调：光学制造，非球面，非接触加工；超光滑抛光，液体抛光；加工机床
关键
中图分类号：TQ171.684;TH161
文献标识码：A
doi;10,3788/OPE,20122004.0719
DesignofCNCnon-contactsuper-smoothpolishingmachine
foropticalcomponents
LIXian-ling
(StateKeyLaboratory ofApplied Optics,Changchun Institute of Optics,
FineMechanics and Physics,ChineseAcademy of Sciences,Changchun 130033,China)
*Correspondingauthor,E-mail,lirianling@sklao.ac.cr
Abstract; A Computer Numerical Control (CNC) non-contact super-snooth polishing method for opti cal components was proposed. Polishing fluid was provided through a center hole of the polishing tool for the optical surface and it interacted with the surfaces of optical components drived by a rotated pol-ishing tool to remove the materials on the optical components minutely, The motion trajectory of the polishing tool could be controlled by the computer. According to the proposed principle, a prototype of CNC non-contact super-smooth polishing machine for the optical components was designed and de-veloped, and its minimum feed rate and positioning accuracy for the linear motion axis are O. ooo 1 m/s and O, oo8 mm,respectively; the minimum rotate speed and positioning accuracy for the swing shaft are 0. oo2 8 r/min and 15',respectively. The performance of the prototype could meet the require-ments of spherical/aspherical optical components with diameters less than 2oo mm for super-smooth polishing. To verify the prototype, an experiment was performed on a fused silica component. After super-smooth polishing for 2o min, the surface roughness of two points on the optical component is
收稿日期：2011-06-10；修订日期：2011-07-19.
基金项目：国家科技重大专项资助项目（No.2009ZX02205）