第20卷第5期 2012年5月
文章编号
1004-924X(2012)05-1069-07
光学精密工程
Optics and Precision Engineering
微机电系统光学组件的系统级建模
李晓莹：，李慧敏，常洪龙，何洋，焦文龙
（西北工业大学陕西省微/纳米系统重点实验室，陕西西安710072）
Vol.2oNo.5
May.2012
摘要：为提高微机电系统（MEMS)中光学系统整体仿真的准确性和效率，解决光学组件系统级建模存在的间题，提出了一种光学组件系统级建模方法，该方法可同时支持与MEMS系统级机械组件和电路组件共同仿真。首先，介绍了多端口组件网络方法、高斯光束特点和空间垒标系变换理论。接着，以微平面镜为例，介绍了光学组件系统级建模方法的流程。最后，采用Verilog-A硬件描述语言建立了包含多个典型光学组件的系统级光学库。使用该库的光学组件在 MEMS集成设计工具MEMSGarden中搭建微扫描系统进行了伤真与测试。与商业软件CoventorWare的分析结果相比，提出的建模方法解决了扫描盲区间题，且非差分电压分析的误差小于3%。结果显示，本文提出的建模方法精确有效，对MEMS的系统级设计有参考价值。
关键词：微机电系统(MEMS)；光学组件；建模；Verilog-A硬件描语言
中图分类号：TH703;TP391
文献标识码：A
doi:10,3788/OPE,20122005,1069
System-levelmodelingforMEMSopticalcomponents LI Xiao-ying', LI Hui-min, CHANG Hong-long, HE Yang, JIAO Wen-long
(Laboratory of Micro and Nano Electromechanical Systems, NorthwesternPolytechnicalUniversity，Xi'an710072，China)
Corresponding author,E-mail;iaoynwpu.edu.cn
Abstract: To improve the accuracy and efficiency of the simulation for the optical system in a Micro-e lectro-mechanical System (MEMS) and to overcome the difficulties in the system-level modeling of MEMS optical components, a system-level modeling method was proposed to support the co-simula-tion for MEMS system-level mechanical components and electrical components. First, the modeling methodology of Multi-Port-Element Network (MuPEN), the characteristics of Gaussian beam and the theory of space coordinate transformation were introduced. Then, the modeling process of a micro mirror was given to explain the modeling method of all optical components. Finally, using the hard-ware description language of Verilog-A, an optical library including some typical components was es-tablished. The non-differential voltage simulation results of the system-level scanning system were compared with those of CoventorWare and results show that the scanning system in former environ-ment can eliminate the blind area, and the maximum error is within 3%. It indicates that the proposed modeling method for optical components could work effectively and accurately, and the study is signif-icant value to the MEMS system-level design.
收稿日期：2011-12-27；修订日期：2012-02-16.
基金项目：国家863高技术研究发展计划（MEMS重大专项）资助项目（No.2007AA04Z347，No.2009AA04Z320）