第22卷第12期 2014年12月
1004-924X(2014)12-3303-07
文章编号
光学精密工程
Optics and Precision Engineering
进动气囊抛光的驻留时间优化
张利鹏”，杨辉，鲍龙祥，李静
Vol.22No.12
Dec.2014
（北京航空精密机械研究所精密制造技术航空科技重点实验室，北京100076）
摘要：提出了一种新的进动气囊抛光驻留时间算法，用于实现高精度的光学玻璃零件的加工。首先，通过抛光工艺试验确定抛光去除率函数；在矩阵选代算法的基础上，给定一个合适的驻留时间初值函数。然后，采用分层阔值去除法进行驻留时间的优化求解，并加上残余误差方差最小的判定条件，从而得到完整的驻留时间函数。该算法适用于非球面、自由曲面等光学玻璃元件的抛光加工。用MATLAB对残余面形误差进行了仿真，仿真结果表明残余误差精度PV值可以收敛到0.1μm左右。最后，对光学玻璃平面进行了抛光。实际抛光后，该玻璃表面粗糙度R，从抛光前的0.159μm减小到0.024um，面形精度PV值由抛光前的0.756μm减小到0.158μm。得到的结果验证了提出驻留时间算法的合理
性，表明该算法可为以后进行复杂面形工件的气囊抛光研究提供理论基础。关键词：光学玻瑞；进动气袁抛光；驻留时间算法；矩阵选代残余误差
中图分类号：TQ171.68
文献标识码：A
doi;10, 3788/OPE.20142212.3303
Optimizationofdwell timealgorithmforprecessionbonnetpolishing
ZHANG Li-peng',YANG Hui,BAO Long-xiang,LI Jing
(AviationKeyLaboratoryof ScienceandTechnologyonPrecisionManufacturing, BeijingPrecisionEngineeringInstituteforAircraftIndustry,Beijing100o76,China)
*Correspondingauthor,E-mail:zlp0410@163.com
Abstract: A key dwell time algorithm in bonnet polishing was investigated to get the high-precision optical surface. Firstly, the removal function of bonnet polishing was acquired from the process exper iments. Based on the matrix iteration, an appropriate initial dwell time function was given to calculate the dwell time with the liminal removal method . Then, the variance of the residual error was consid-ered to optimize the result of dwell time function and to acquire the dwell time function quickly. The method is suitable for polishing the optical elements such as aspheric surface, and free-form surface. A simulation experiment was performed on a residual surface error through MATLAB, and the results show that the residual error PV value has reached up to O. 1 μm. Finally, an optical glass surface was processed on the bonnet polishing machine developed by ourselves, and results show that its surface roughness R, is reduced from 0.159 μm to 0.024 μm and the PV value from 0. 756 μm to 0.158 μm. Moreover, the rationality of the dwell time algorithm was verified. It demonstrates that the matrix based algorithm satisfies the requirement of optical precision machining very well and provides theo-retical basis for bonnet polishing of complex optical elements.
收稿日期：2014-03-05；修订日期：2014-04-13
基金项目：航空创新基金资助项目（No.2010E30321）；武器装备预研基金资助项目（No.9140A18020307HK1301）