第19卷第12期 2011年12月
文章编号1004-924X(2011)12-2935-06
光学精密工程
Optics and Precision Engineering
集成铜金属压阻层的SU-8胶悬臂梁微力传感器的制作
褚金奎*，陈兆鹏，张然
（大连理工大学机械工程学院，辽宁大连116024）
Vol.19No.12
Dec, 2011
摘要：由于SU-8胶的弹性模量比硅的低，在SU-8胶悬臂梁上集成金属压阻可获得很高的力灵敏度系数，因此本文基于艺，并进行了传感器性能测试。实验结果表明：设计的SU-8胶微力传感器在0～350μN具有较好的线性度，力灵敏度为 0.24mV/μN，测量误差为4.06%。该微力传感器可以满足对微小力的测量，相对于硅材料的微力传感器，其制作工艺
更加简单，周期更短。由于SU-8胶的生物兼容性好，该传感器在生物医学研究领域有着很好的应用前景。关键词：SU-8胶；金属压阻；微力传感器；悬臂梁
中图分类号：TP212.12
文献标识码：A
doi,10.3788/OPE.20111912.2935
Microfabricationof sU-8cantilevermicro-forcesensor
integrated bycopperpiezoresistance CHU Jin-kui', CHEN Zhao-peng, ZHANG Ran
(School of Mechanical Engineering,Dalian University of Technology,Dalian116024,China)
Correspondingauthor,E-mailchujk@dlut.edu.cn
Abstract: As the SU-8 cantilever integrated by a metal piezoresistance can achieve a very high force sensitive coefficient due to its low elastic modulus, this paper designs a new type of SU-8 cantilever micro-force sensor integrated by a serpent-shaped copper piezoresistive structure and fabricates a pro totype with a double-layer cantilever by a novel processing method. It introduces the design principles and fabrication method for the micro-force sensors and measures its technological parameters. Experi-mental results show that the SU-8 micro-force sensor has good linearity range in 0350 μN and its force sensitivity is 0. 24 mV/μN and measuring error is 4. 06%. It can implement the micro-force de tection and has advantages of simpler production process and shorter cycle as compared with a silicon micro-force sensor. Moreover,the force sensor has potential application in biomedical research for the SU-8 with prominent biological compatibility.
Key words: SU-8; metal piezoresistance; micro-force sensor; cantilever
收稿日期：2011-05-23：修订日期：2011-06-21.
基金项目：国家自然科学基金资助项目（No.51175056)；国家973重点基础研究发展计划资助项目(No.2011CB302101)