第24卷第4期 2016年4月
1004-924X(2016)04-0819-07
文章编号
光学精密工程
Optics and Precision Engineering
Vol, 24No. 4
Apr.2016
基于图像清晰度检测的光栅刻划平台调平装置
丁健生，史国权，石广丰
（长春理工大学机电工程学院，吉林长春130022）
棚刻划平台在线调平装置。建立了图像清断度与光栅刻划平台倾角间关系的模型，应用该模型，控制光栅刻划平台在一定范围内实现了闭环动态调平。对上述理论研究进行了试验验证。试验结果表明，该调平装置简单可行；对于50mm X50mm的光栅毛胚，调平装置可控制刻划平台的水平倾角在4以内，满足光栅刻划对平台定位精度的要求。该装置既
可用于刻划前的调平准备，也可推广应用于光栅刻划过程中的实时检测。关键词：光栅刻划：光橱判划平台；调平装置；图像清晰度测量；评价函数
中图分类号：TN305.7
文献标识码：A
dol;10,3788/OPE.20162404.0819
Grating rulingplatformlevelingdevicebased on
imageclaritymeasurement
DING Jian-sheng，SHIGuo-quan'，SHI Guang-feng
(College of Mechanical and Electric Engineering,Changchun Universityof
Science andTechnology,Changchun 130022,China) Correspondingauthor,E-mailsgq@cust.edu.en
Abstract: To reduce the grating groove errors caused by the inclination of a grating ruling platform in the fabrication of diffractive gratings this paper proposes a real-time leveling device for the grating rul-ing platform based on image clarity measurement and electrically adjusting a tilting table. A physical model was built based on the inclination relations between the image clarity measuring and the inclina tion angle of grating ruling platform. Based on the model, the leveling device could control the grating ruling platform to implement the closed loop dynamic leveling within a certain range. The above theo ry was verified by tests. The results show that the leveling device is simple and feasible, For a grating blank with a size of 50 mmX 5o mm, it controls the inclination of the grating ruling platform to be within 4", meeting the requirements of the grating ruling for platform positioning accuracy. Moreo ver, the leveling device can be used in leveling before ruling and also in ruling processing in real time. Key words: grating ruling; grating ruling platform; leveling device; image clarity measurement; , e
valuationfunction
收稿日期：2015-12-01；修订日期：2016-01-20
基金项目：国家自然科学基金资助项目（No，51405031，No.51575057）