第19卷
第10期
2011年10月
文章编号
1004-924X(2011)10-2342-07
光学精密工程
Optics and Precision Engineering
Vol, 19No. 10
Oet.2011
可激发等离子体表面波的离子交换单模条波导
刘瑾1-2，陈抱雪1*，杨海马！
（1.上海理工大学光电信息与计算机工程学院上海市现代光学系统重点实验室，上海200093；
2.上海工程技术大学电子电气工程学院，上海201620）
摘要：设计并制备了高子交换单模条波导，用于激发等离子体表面波。研究了波导设计过程中相关参数的确定方法、条 B270光学玻璃上制备出渐变型平面波导，采用余误差函数拟合其折射率分布，得到了一定工艺参数下的光波导扩散系数Da与折射率增量值△n。在此基础上，利用等效折射率法给出单模波导条件，设计相应的工艺参数，以光刻技术为核心在0.1%AgNO,～99.9%NaNO，混合熔融盐中实验制备了单模条波导，并进行模场分布测试。结果表明，制得的单模条波导具有良好的单模特性；在此波导上镀50nm的金膜，采用40%～70%的甘油溶液进行测试，可激发等离子体表面波，
关
键调：单模条波导；离子交换；等离于体表面波
中图分类号：TN252
文献标识码：A
doi;10.3788/OPE.20111910. 2342
Ion-exchange single-mode stripe waveguide
forexcitationofsurfaceplasmawave
LIU Jinl",CHEN Bao-xue'',YANG Hai-ma
(1.Shanghai Key Laboratory of Modern Optical Systems,School of Optical-electrical qnd Computer Engineering,University of Shanghai for Science and Technology, Shanghai 200093, China;
2.College of Electronic and Electrical Engineering,Shanghai University of
EngineeringScience，Shanghai201620,China)*CorrespondingauthorE-mailbrchen55@live.cn
Abstract: An ion-exchange single-mode stripe waveguide was designed to excite the surface plasma wave, The experimental determination method of relative parameters, the two-dimensional diffusion and refractive index distribution of the stripe waveguide and the excitation of surface plasma wave were investigated. Based on Ag-Na+ ion-exchange technology, the planar waveguide with a graded refractive index was prepared on Germany B270 optical glass. By taking a complementary error func tion to fit the refractive index distribution, the diffusion coefficient (Dr) and the refractive index in crement (n) of the waveguide were obtained under certain process parameters. On this basis, the condition of single-mode waveguide was calculated by using equivalent refractive index method and the corresponding technological parameters were designed, Finally, the single-mode strip waveguide was
收稿日期：2010-12-13；修订日期：2011-02-17.
基金项目：国家自然科学基金资助项目（No.61077042；60677032)；上海市重点实验室建设资助项目（No.
08DZ2272800)；上海市重点学科建设资助项目（No.S30502)；上海市科委资助项目（10160501700)；上海工程技术大学校教学建设项目（k20110201;p201102003；k201102003）