
第20卷第1期 2012年1月
文章编号1004-924X(2012)01-0109-08
光学精密工程
Optics and Precision Engineering
条纹周期动态可调的通用型干涉仪
朱勇建1,2,那景新2*,潘卫清3,李安虎4,尹韶辉
(1.湖南大学汽车车身先进设计制造国家重点实验室,湖南长沙410082;
2.吉林大学汽车仿真与控制国家重点实验室,吉林长春130025:
Vol. 20No.1
Jan.2012
3.浙江科技学院理学院,浙江杭州310023;4.同济大学机械工程学院,上海200092)
摘要:提出一种新型结构的通用型干涉仪,用于实现不同结构、不同形状的光学透镜、光学晶体等元件的快速目视观察与精确测量。该干涉仪利用可相对旋转的双光楔对条纹周期进行动态调制完成实时检测。以两块雅敏干涉平板为主体结构,在双光路中各自放入一对模角完全相同的光模对,建立条纹周期和条纹倾斜方向与光模对相对旋转角度之间的关系,并采用光学晶体畴反转实时检测验证干涉仪的测量性能,试验结果表明,干涉仪的相位检测精度约为0.2rad(入/ 30),条纹周期(一对黑白条纹)为0.105~5.993mm/pair,光路中光楔对的相对转角可在0~179"调节。干涉仪具有完全对称的光路结构,由于较高的稳定性和抗干扰能力,可针对不同类型光学元件的结构特点进行条纹周期的实时调制,并可达到较高的检测精度。
关键词:干涉仪;条纹周期;动态调节;光模
中图分类号:TH744.3
文献标识码:A
doi;10.3788/OPE.20122001.0109
Universal interferometerbased on dynamically-adjusted fringeperiods
ZHU Yong-jian',NA Jing-xin*',PANWei-qing",LI An-hu',YIN Shao-hui
(l.StateKey Laboratory of AdvancedDesign and Manufacturing
forVehicleBody,HunanUniversity,Changsha41oo82,China;2.StateKeyLaborataryof
AutomotiveSimulation and Control,JilinUniversity,Changchun130025,China;
3.School of Science,Zhejiang University of Science and Technology,
Hangzhou310023,China;4.Collegeof Mechanical
Engineering,TongjiUniversity,Shanghai200092,China)
Correspondingauthor,E-mail;najz@jlu.edu,cn
Abstract: A universal interferometer is proposed to realize the eyeballed evaluation and accurate meas-urement of many kinds of optical elements with different structures and shapes, such as lenses and crystals. In the interferometer, a pair of optical wedges are used to adjust the fringe periods dynami cally to implement the measurement in real time. The interferometer takes two Jamin glass plates as a main structure, between which two pairs of optical wedges are laid. All wedges are completely identi-
收稿日期:2011-07-25;修订日期:2011-08-17,
基金项目:国家自然科学基金资助项目(No,51005212);高等学校博士学科点专项科研基金资助项目(No.
200805321035);湖南大学汽车车身先进设计制造国家重点实验室开放基金资助项目(No.31075005);湖南省自然科学基金资助项目(No10JJ4030);中央高校基本科研业务费;中国博士后科学基金资助项目(No, 2011M500936)