第19卷第7期 2011年7月
1004-924X(2011)07-1437-07
文章编号
光学精密工程
Optics and Precision Engineering
Vol.19No.7
Jul.2011
斜入射干涉检测大口径碳化硅平面反射镜
刘兆栋，陈磊，韩志刚，严庆伟”，朱日宏
（1.南京理工大学电子工程与光电技术学院，江苏南京210094；
2.南京中科天文仪器有限公司，江苏南京210042）
0 了绝对测量。首先，在一个标准的斐索干涉测试结构中测出空腔波面数据；然后，将被测平面置于干涉光路中，使被测件光轴与干涉仪光轴成。角，测得第二组波面数据。对两组波面数据处理后得到SiC平面反射镜中心垂线方向的绝对面形分布。最后，测量了630mm口径SiC反射镜多条垂线方向的绝对面形。结果显示，中心垂线处的绝对检验PV值为 0.061入，RMS为0.014入。实验结果表明，该测量装置可以实现比干涉仪有效口径大的光学平面垂线方向的绝对面形检
测，尤其适用于镀有高反膜的光学表面或者金属表面等面形的绝对测量。关键调：光学测量；斜入款干涉仪；SiC平面反射镜
中图分类号：TH744.3;TB92
文献标识码：A
doi:10.3788/OPE.20111907.1437
Measurement of large aperture SiC flat mirrors
byobliqueincidenceinterferometry
LIU Zhao-dong'·,CHEN Lei',HANZhi-gang',YAN Qing-wei',ZHU Ri-hong
(l. School of Electrical Engineering and Photoelectric Technology, NanjingUniversityof Science&Technology,Nanjing210094，China; 2.NanjingAstronomical InstrumentsCorporation,Nanjing210042,China)
*Correspondingauthor,E-mail:liuzhaodong6@hotmail.com
Abstract: A self-developed large aperture near-infrared phase-shifting flat interferometer was used to perform an absolute test for a large aperture SiC flat mirror in an oblique incidence condition. Firstly, the cavity wavefront data were obtained in a standard Fizeau configuration, and then the test flat was put into the cavity in its normal axis with an angle α to the optical axis of the interferometer to obtain the second wavefront data set. After processing the two data sets, the absolute vertical profile across the center of SiC mirror was also obtained. Finally, several absolute vertical profiles of the 630 mm SiC mirror were measured and the results indicate that PV and RMS of the center absolute vertical profiles are 0. 061 and 0. 014>,respectively. The experimental results show that this measurement de-vice can achieve the absolute tests of vertical direction of flat mirrors with the effective apertures lar-ger than that of the interferometer, and it is especially applicable for the absolute tests of optical sur
收稿日期：2010-09-13；修订日期：2010-11-18
基金项目：江苏省"六大人才高峰"基金资助项目（No.06E030）