第18卷
第7期
2010年7月文章编号
1004-924X(2010)07-1548-06
光学精密工程
Optics and Precision Engineering
Vol.18No.7
Jul.2010
变包含角平面光栅单色器扫描转角精度的检测
卢启鹏"，马磊1.2，彭忠琦1
（1.中国科学院长春光学精密机被与物理研究所应用光学国家重点实验室，吉林长春130033；
2.中国科学院研究生院，北京100039）
摘要：针对上海光源（SSRF)软X射线谱学显微光束线站高分辨变包含角单色器（VAPGM)在超高真空环境下对波长扫描机构转角精度的现场测试，提出了一种实用、有效的检测方法。采用自制的多角梭镜，结合高精度光电自准直仪进行现场测试。首先，介绍了单色器波长扫描原理，给出角度与波长的关系；接着，理论分析了转角精度与系统分辨率之间的关系最后，介绍了该方法的检测原理、装置及检测步骤。利用该方法完成了VAPGM平面镜（PM)和平面光栅（PG)转角精度的检测，结果分别为0.19",0.22"，满足单色器技术指标要求。在电离室在线检测了标定后的单色器系统的分辨率，测试结果好于10000，进-步验证了该检测方法的有效性。
键词：同步辐射；实包含角单色器；波长担插机构：转角精度；多角校镜关
中图分类号：TH744.1；TB92
文献标识码：A
doi;10.3788/OPE.20101807.1548
Rotation-angle-accuracymeasurementof scanning mechanism in
variable included angleplanegratingmonochromater
LU Qi-peng' ,MA Leil-2,PENG Zhong-qi
(l.StateKey Laboratory of Applied Optics,ChangchunInstituteof Optics
Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033, China; 2.Graduate University of Chinese Academy of Sciences,Beijing 100039,China)
Abstract; A simple, practical, and effective method for measuring the rotation-angle-accuracy of the wavelength scanning mechanism in a Variable Included Angle Plane Grating Monochromator(VAPGM) was proposed in an ultra-high vacuum environment. The method was achieved by using a special angle mirror and a high-precision photoelectric autocollimator. Firstly, the relationship be tween angle and wavelength was described on the basis of the principle of VAPGM wavelength scan-ning. Then, the dependence of rotation-angle-accuracy on system resolution was analyzed. Finally, the principle, devices and steps of the method were introducted in detail. By using this method,the ro-tation-angle-accuracies of the Plane Mirror (PM) and the Plane Grating (PG) were measured, and the results show that they are 0. 19"and o. 22’, respectively, which fulfills the technical requirements of VAPGM.The resolution power of this monochromator was tested by an ionization chamber after measuring the rotation-angle-accuracy, and the result is superior to 1oooo. The experimental result
收稿日期：2009-10-15；修订日期：2009-11-23
基金项目：国家重大科学工程上海光源工程项目（No.SS-06，O7093XQ070）；应用光学国家重点实验室开放基金资
助项目（No.O9Q33FQ091）