第19卷第11期
2011年11月文章编号
1004-924X(2011)112679-06
光学精密工程
Optics and Precision Engineering
Vol.19No.11
Nov.2011
微尺度激光喷丸强化TiN涂层的表面性能
周建忠”，卫登辉，黄舒，朱伟，樊玉杰（江苏大学机械工程学院，江苏镇江212013）
摘要：采用直径为300μm的激光光斑对TiN涂层表面进行微尺度激光喷丸强化处理以进一步提高TiN涂层的表面性能。利用光学轮席仪和纳米力学测试系统测量了不同激光工艺参数作用下TiN涂层喷丸区城的表面形貌、纳米硬度及弹性模量分布。结果表明，喷丸区域形成的圆锥形凹坑最大深度约为1.2μm，纳米硬度和弹性模量在喷丸中心处变化最大，并在一定范围内随着激光能量的增大而增大，当激光能量为250mJ时，两者最大，分别达到50.21GPa和402.8 GPa，与初始状态相比分别提高了140%和43.9%。
关键调：激光技术；激光喷丸强化；TiN涂层，表面形貌；纳米硬度
中图分类号：TN249；TG156.99
文献标识码：A
doi;10.3788/OPE,20111911.2679
MicroscalelasershockpeeningonTiNcoatings ZHOU Jian-zhong',WEI Deng-hui,HUANG Shu,ZHUWei,FAN Yu-jie
(SchoolofMechanicalEngineering，JiangsuUniversity，Zhenjiang212013,China)
Corresponding author,E-mail:zhoujzujs.edu.cn
Abstract: A TiN coating was modificated by microscale Laser Shock Peening (μLSP) based on the la ser spot with a diameter of 3oo μm to further improve its surface properties. An optical profiler and a nanomechanical test system were used to observe and measure the surface morphology, nano-hardness and the elastic modulus of the TiN coating in a peening area with different μLSP parameters. Experi-mental results show that a conical dent is formed in the peening area after μLSP, and the biggest depth is about 1. 2 μm. The nano-hardness and elastic modulus are significantly changed in the center of peening area, and they are enhanced with the increase of laser energy in a certain range. When the laser energy is 25o mJ, both the nano-hardness and elastic modulus reach the maximum, which are 50. 21 GPa and 402. 8 GPa, respectively. Compared with the initial state of the TiN coating, they have been increased by 140% and 43.9%,respectively.
Key words: laser technique; laser shock peening; TiN coating; surface morphology: nano-hardness
收稿日期：2011-03-15；修订日期：2011-06-12.
基金项目：国家教育部博士学科点基金资助项目（No.200802990004）；江苏省自然科学基金资助项目（No.
BK2009219)；江苏省高校自然科学基金重大项日基金资助项目（No,08KJA460002)；江苏省六大人才高峰资助项目（2009)；镇江市工业支撑项目（No.SGY20090026）；江苏大学校科研项目基金资助项目（No. CX08B-06X)