第22卷第5期 2014年5月
文章编号
1004-924X(2014)05-1227-08
光学精密工程
Optics and Precision Engineering
Vol.22No.5 May.2014
平行双关节坐标测量机的标定及不确定度评价
夏桂锁*，廖城，伏燕军
（南昌航空大学无损检测教育部重点实验室，江西南昌330063）
摘要：借鉴国外ScanMax测量机所具有的优势，研发了RRP结构（即两个转动和一个直线运动)的平行双关节垒标测量机，并研究了该仪器的误差模型、标定方法和不确定度评定方法。首先，根据平行双关节坐标测量机的机械结构建立了仪器的数学模型和误差模型。然后，基于全误差分析技术设计了仪器的标定方案并分别介绍了对重力和扭矩变形、平行度、臂长、零位等参数的标定。最后，根据国家坐标测量机校准规范，提出了通过评价测量重复性和长度测量精度的方法来评定测量不确定度。实验结果表明：在1000mm×250mm(直径×高度）的测量范围内，平行双关节坐标测量机的测量不确定度可达到12um(=2)。得到的结果验证了平行双关节坐标测量技术及全误差分析技术的可行性，为非正交坐标测量机的标定探索了新的方法。
关键调：平行双关节；坐标测量机；全误差分析；不确定度；标定
中图分类号：TH721.1：TP242
文麟标识码：A
doi;10.3788/OPE.20142205.1227
Calibrationanduncertaintyevaluationofdoubleparallel-joint
coordinatemeasuringmachine XIA Gui-suo'，LIAOCheng，FU Yan-jun
(KeyLaboratoryof NondestructiveTestingof theMinistry ofEducation，
NanchangHangkongUniuersity，Nanchang330063，China）
+Correspondingauthor，E-mail:riaguisuo@163.com
Abstract:On the basis of advantages of ScanMax measuring machines at abroad, a double parallel-join CoordinateMeasuringMachine（CMM）withaRRPstructure（tworotationmovementsand a line movement)was developed，and its error model,calibration method and uncertainty evaluation was investigated. Firstly, the mathematical model and error model was established according to the me chanical structure of the double parallel-joint CMM. Then, the calibration scheme was designed based on the total error analysis, and calibration methods of the parameters such as gravity, torque deforma tion, parallelism, arm length, null were introduced. Finally, based on the national Calibration Speci-fication for CMM, a evaluation method by measurement repeatability and the precision of length meas urement to evaluate measurement uncertainty was proposed. The experiments by proposed method show that the measurement uncertainty of double parallel-joints CMM can reach 12 μm (k=2) in a measurementrange of1ooommX25omm（diameterXheight).Itisprovedthatbothdouble
收稿日期：2013-11-12；修订日期：2013-12-21.
基金项目：国家自然科学基金资助项目（No.51365045)；南昌航空大学博士启动基金资助项目（No.EA201308039）