第19卷
第11期
2011年11月
文章编号
1004924X(2011)11-2724-07
光学精密工程
Optics and Precision Engineering
时间/压力型pL级微点胶技术
史亚莉*，张文生，徐德，张正涛，张娟
（中国科学院自动化研究所精密感知与控制中心，北京100190）
No. 11
Vol.19
Nov,2011
摘要：针对惯性约束核聚变实验装配冷冻靶中靶丸与充气管零件时对用胶量的要求(3pL)，对时间/压力型pL级微点胶技术进行了研究。将细胞实验用的微注射器改造成时间/压力型微量点胶机，并使用针尖最小内径为0.5m，由石英材料制作的毛细针进行点胶。搭建了一个微点胶实验平台，设计了分辨率为1.57um的双目显微视觉检测系统，对毛细针尖的位置和胶滴大小进行实时检测，并使用分辨率为3μm的三自由度微运动平台对针尖位置进行控制。介绍了微点胶实验平台的硬件组成、控制系统以及点胶流程，并在该平台上进行了胶量控制、胶滴定位实验和胶斑测量实验，研究了影
。实验结果表明，在常温下使用黏度为5P的紫外固化环氧
响胶量控制的主要因素和最小可控胶量等关键微点胶工艺，
胶，该平台可实现的最小点胶量为2pL，可用于需要pL级点胶的微装配中。
词：pL；摄点胶实验平台；时间/压力型点胶技术
关键
中图分类号：TH16
文献标识码：A
doi;10.3788/OPE.20111911.2724
Time/pressurepLmicro-bondingtechnology
SHI Ya-li', ZHANG Wen-sheng, XU De, ZHANG Zheng-tao, ZHANG Juar
(CenterforPrecisionPerceptionand Control,Instituteof Automation，
ChineseAcademy of Sciences,Beijing 100190,China)*Correspondingauthor,E-mailshiyalio825@126.com
Abstract: To satisfy the requirement of assembling a capsule and a fill tube for the cryogenic targets in ICF experiments for the 3 pL adhesive volume, the time/pressure micro-bonding technology was stud-ied. A microinjector for life science research was changed to a time/pressure pL micro-bonding device, and a capillary needle made of quartz with inside diameter of 0. 5 μm was used for dispersing. A micro bonding station was built for experiments. Two microscopes interfaced with CCD and resolution of 1. 57 μm were designed to detect the position of the capillary tip and the size of the glue drop, and a XYZ motion stage was employed to control the position of the capillary tip. The hardware composi-tion, control system, dispensing process of the micro bonding station was introduced, and the dispen-sing control, adhesive volume detection, and glue drop positioning experiments were performed to re-search the key dispensing processes, such as the main factors that affects the volume control and the minimum volume that can be controlled, Experimental results indicate that the designed station can control the minimum adhesive drop in 2 pL using UV Epoxy adhesive with viscosity of 5P in the nor-
收稿日期：2011-05-04；修订日期：2011-06-25
基金项目：中国科学院知识创新工程重要方向资助项目；国家基金委重大研究计划资助项目（No.90924026）