第18卷第4期 2010年4月
文章编号
1004-924X(2010)04-0887-06
光学精密工程
Optics and Precision Engineering
卧式板型直线超声电机的微型化
李朝东，何晓菁
（上海大学机电工程与自动化学院，上海200072）
Vol.18No. 4 Apr，2010
摘要：基于L1B板型直线超声电机，研制了一种外型尺寸为36mm×5mm×4mm的卧式板型微型直线超声电机。论述了电机的工作原理和运行机理，使用解析法和有限元法进行了微型化结构设计，分析了定子的振动模态，并实现了频率简并。通过模拟压电激励的动态频率响应，对比了样机的5片压电瓷布置方案和常用的两片压电陶瓷布置方案的共振位移响应曲线，证实了采用5片压电陶瓷布置方案增大了输出端点处产生的振动位移。样机特性测试实验表明，当激励信号电压为150V，，频率为62kHz时，电机最大速度为183.7mm/s，输出推力为50mN预期该电机可以用于电
机安置空间比较狭窄且需要一定动力的直线驱动场合。关键词：直线超声电机；L1B4振动模态：微型电机
中图分类号：TM35
文献标识码：A
Miniaturizationof board-typehorizontallinearultrasonicmotor
LI Chao-dong,HE Xiao-jing
(Schoolof MechatronicsEngineeringandAutomation， ShanghaiUniversity,Shanghai 200072,China)
Abstract: On the basis of research of L1B4 board-type horizontal ultrasonic linear motors, a kind of board-type horizontal ultrasonic linear micromotor in sizes of 36 mmX5 mmX 4 mm is studied. The working principle and moving mechanism of this micromotor are described,and the miniaturizing de-sign of the micro stator is executed by Finite Element Analysis(FEA) method. Then the vibration modes of the prototype are analyzed to realize the frequency degeneration. By using linear dynamic fre quency response to simulate excited piezoelectricity, the layout of prototype with 5 PZTs and that of accustomed one with 2 PZTs are compared. Obtained results approve that the structure with 5 PZTs increases the vibrating displacement of an output point. The feature testing of prototype is carried out, and the experimental results show that this motor can offer the maximum velocity of 183. 7 mm/s and the maximum thrust force of 50 mN, while excitation frequency is 62 kHz and voltage is 150 Vp. This motor can be expected to be used in the linear driving field that has narrow space and needs certain driving force.
Keywords:linearultrasonic motor;L1B4vibrationmode;micromotor
收稿日期：2008-12-08；修订日期：2009-03-31.
基金项目：国家863高技术研究发展计划资助项目（No.2007AA04Z212）