第20卷
第8期
2012年8月
文章编号1004-924X(2012)08-1740-07
光学精密工程
Optics and Precision Engineering
Vol. 20No. 8
Aug.2012
全相位谱分析在自混合于涉位移测量中的应用
杨颖，李醒飞，寇科，王错
（天津大学精密测试技术及仪器国家重点实验室，天津300072）
摘要：提出基于全相位谱分析的自混合干涉信号处理方法，用于减小激光自混合干涉位移测量的误差。首先，基于三镜法布里-珀罗腔模型介绍了自混合于涉系统的数学模型，分析了自混合干涉信号的产生机理和特性，然后，研究了弱反馈条件下自混合干涉位移测量方法，采用全相位谱分析算法进行相位测量，重构外部反射体位移曲线；讨论了信号处理算法原理并进行了算法伤真。最后，进行自混合干涉位移测量实验，并给出压电陶瓷位移测量实验结果。结果表明，全
加外部光学元件的前提下将位移测量误差减小到纳米量级。：键调：自混合平涉，全相位语分析；位移测量；压电陶资
中图分类号：TH744.3TH822
文献标识码：A
doi;10. 3788/OPE, 20122008. 1740
Application of all-phase spectral analysis to self-mixing
interferometryfordisplacementmeasurement
YANG Ying,LIXing-fei',KOUKe,WANG Cuo
(StateKey Laboratory of Precision MeasuringTechnology and Instruments,
TianjinUniversity,Tianjin 300072,China) Corresponding author,E-mail :lixf@tju.edu.cn
Abstract: A signal processing technique based on all-phase spectral analysis was proposed to reduce the displacement measurement error of a self-mixing interferometer. Self-mixing interference principle and signal processing technique were analyzed. First, the mathematical model and signal characteris tics for the self-mixing interferometer were presented based on the model of laser oscillation cavity with three mirrors. Then, the displacement principle based on self-mixing interference was intro duced. A all-phase spectral analysis was used to extract the phase of self-mixing interference signal to reconstruct the displacement of a reflective target and the signal processing algorithm was investigated with arithmetic simulation. Finally,an experiment system was established and the calibration result of bimorph PZT was presented. Experimental results indicate that the displacement error can be de-creased to 4, 4 nm by using all-phase spectral analysis. It concludes that the all-phase spectral analysis can reduce the displacement error of the self-mixing interferometer to nanometer level without increas ing the number of optical elements.
收稿日期：2012-04-13；修订日期：2012-05-14.
基金项目：高等学校博士学科点专项科研基金资助项目（No.20110032110052)；精密测试技术及仪器国家重点实验
室开放基金资助项目（No.2006A10401006)