第18卷第8期 2010年8月
文章编号
1004-924X(2010)08-1754-06
光学精密工程
Optics and Precision Engineering
利用Zernike系数对离轴三反射系统
进行计算机辅助装调
盾1.2，田铁印，王红1
（1.中国科学院长春光学精密机与物理研究所
光学系统先进制造技术中国科学院重点实验室，吉林长春130033；
2.中国科学院研究生院，北京100039）
Vol, 18No.8
Aug.2010
摘要：针对离轴三反光学系统检测和装调的复杂性，提出了一套结合了干涉测量技术的计算机辅助装调方法。采用多视场ZYGO干涉仪自准干涉检验各种失调量产生的残余像差，得到表征系统失调量引起残余像差的一系列Zernike系数，利用Zernike系数与Seidel像差系数之间的相关性将之转化为几何像差作为校正对象，由光学设计软件求得与系统失调量相关的灵敏度矩阵，并确定对残余像差影响最敏感的失调量。当失调量被确定后，将调整后的结果再次代人光学设计软件进行验证。多次代后，得到系统的RMS值<0.04>的良好结果，证明了这种指导装调的方法是行之有效的。关键调：离轴三反系统；计算机辅助装调；干涉检验；灵敏度矩降
中图分类号：V248.3;TP391.7
文献标识码：A
doi;10, 3788/OPE, 20101808. 1754
Computer-aided alignment of off-axis three-mirrorsystem
by usingZernike coefficients GONG Dun'- , TIAN Tie-yin', WANG Hong
(l.Key Laboratory of Optical System Aduanced Manufacturing Technology, Changchun Institute ofOptics,FineMechanics and Physics,ChineseAcademyof Sciences,Changchun130033,China
2. Graduate University of Chinese Academy of Sciences, Beijing 100039, China)
Abstract: A computer-aided alignment method in combining with the interferometry was proposed to optimize the detection and alignment of an off-axis three-mirror system. By using a multi-fields ZYGO interferometer, a series of Zernike coefficients were obtained to express the incorrect parameters of the system, which were then transformed into geometric aberrations as the corrected objects based on the dependence of Zernike-coefficents on Seidel aberrations, Furthermore, an optical design software was used to derive the sensitivity matrix related to the incorrect parameters and to determine the incorrect parameter mostly sensitive to the redual aberration. Consequently, the adjusted result was brought in-to the software to verify the selection of incorrect parameters. Experimental results show that the RMS value of the system is lower than O. 04> after iterations, which proves the effectiveness of the
收稿日期：2009-05-14；修订日期：2009-09-01. 基金项目：中国科学院三期创新工程资助项目