第19卷
第12期
2011年12月
文章编号1004-924X(2011)12-2927-08
光学精密工程
Optics and Precision Engineering
Vol.19No.12
Dec.2011
基于自停止腐蚀技术的H型谐振式微机械压力传感器
李玉欣*，陈德勇，王军波，焦海龙，罗振宇
（中国科学院电子学研究所传感技术国家重点实验室，北京100190）
摘要：为了提高压力传感器的精度并抑制温漂，提出了一种基于自停止属蚀技术的“H"型双端固支梁、电磁激励、差分检测的微机械（MEMS)谐振式压力传感器。首先，通过有限元分析仿真优化了传感器的机械参数，得到了较高的灵敏度和分辨率。然后，基于浓硼扩散自停止腐蚀原理，采用MEMS体硅标准工艺加工出一致性较好的传感器样品。最后，采用非光敏 BCB，在真空高湿高压条件下将硅片与谐振器黏和键合完成了传感器的真空封装，并设计了应力隔离的后封装方法以降低温漂。实验结果表明：传感器的检测范围为0~120kPa，满量程非线性度低于0.02%，准确度达到0.05%FS，加人应力隔离后在一40～70℃的温度漂移不高于0.05%/C。该传感器能够实现大量程高精度的压力测量，有效地抑制了温漂，具有较高的性能指标。
关键调：微机械压力传感器；谐振式压力传感器；双端固支梁；差分检测；黏和键合
中图分类号：TP212.12
文献标识码：A
doi;10.3788/OPE, 20111912. 2927
Htypemicro-machinedresonantpressuresensor
basedonself-stoppedetchtechnique
LI Yu-xin',CHENDe-yong,WANG Jun-bo,JIAOHai-long,LUO Zhen-yu(StateKey Laboratory of Transducer Technology,Instituteof Electronics,
ChineseAcademy of Sciences,Beijing 100190,China)
*Correspondingauthor,E-mail:liyuzinlo7@mails.gucas.ac.cn
Abstract: In order to increase accuracy and reduce temperature drifts of pressure sensors, a micro-ma-chined resonant pressure sensor with H-type doubly-clamped lateral beams was proposed based on electromagnetically driving and differential detection. First, Finite Element Method(FEM) analysis was performed to guarantee the sensitivity and the resolution of the sensor. Then, based on the bo-ron-diffusion self-stopped etch technique, a sensor sample with good uniformity was achieved by a standard bulk Micro-electro-mechanical System(MEMS) process. Finally, the vacuum package of the sensor was accomplished by adhesive bonding using non-photosensitive BCB(Benzocy-clobutene,DVS BCB-3022-46) and stress isolation.Experimental results show that the nonlinearity is lower than 0.02% in 0 to 120 kPa with a accuracy of 0.05% FS, and the temperature drift is less than 0.05%/C in 40o C to 7o C.The sensor can suppress temperature drifts and realize pressure measurement in wide measuring range and higher precision.
收稿日期：2011-04-12；修订日期：2011-05-18.
基金项目：国家自然科学基金资助项目（No.60772018NSFC)；国家863高技术研究发展计划资助项目（No.
2007AA04Z318)