第21卷第3期 2013年3月
文章编号1004-924X(2013)03-0664-08
光学精密工程
Optics and Precision Engineering
Vol. 21No.3
Mar,2013
零阿贝误差的纳米三坐标测量机工作台及误差分析
黄强先，余夫领，，官二敏，王晨晨，费业泰
（合肥工业大学仪器科学与光电工程学院，安徽合肥230009）
摘要：为避免常规三坐标测量机(CMM)中的阿贝误差，同时降低导轨运动误差对测量机测量不确定度的影响，研制了. 种在三维测量方向上同时符合阿贝原则的纳米CMM工作台。该工作台做三维运动，导轨和y导轨采用共平面结构工作台三维测量系统的测量线正交于一点且正交点与测头中心点重合，向和向测量系统的测量线与y导轨面共
了影响测量机不确定度的主要误差源，并对这些误差提出了修正方法。在研制的工作台上对一等量块进行了实验测试。结果显示，一等量块工作面的平面度测量标准差为11nm，台阶高度标准差为21nm，其中台阶高度测量平均值与检定值相差1nm，理论分析和实验结果表明，所研制的工作台从结构上避免了CMM中多项误差源的影响，尤其是避免了阿贝误差的影响，可用于高精度的三维测量。
关键调：三维纳来工作台；纳来三坐标测量机；阿贝误差；误差修正
中图分类号：TH72;TH711
文献标识码：A
doi:10, 3788/OPE, 20132103. 0664
Nano-CMMstagewithzeroAbbeerroranditserroranalysis HUANG Qiang-xian, YU Fu-ling', GONG Er-min, WANG Chen-chen, FEI Ye-tai
(School of Instrument Science and Opto-electronic Engineering
HefeiUniversityof Technology,Hefei230009,China)
*Correspondingauthor，E-mail:yufl11@163.com
Abstract: A new type nanometer Coordinate Measuring Machine(CMM) stage which meets the Abbe principle in three-dimensional directions is proposed to avoid the Abbe error in conventional CMMs and reduce the guide motion error that influences on the nano-CMM measurement uncertainty. The stage can move in three dimensional directions and its guide and y guide are in a coplanar structure. The three measuring lines of the stage are orthogonal and intersect at one point which coincides with the center of a probe. Moreover, the measuring lines of r measurement system and y measurement system are coplanar with the plane of the zy stage. According to the characteristics of this stage, the impacts of various errors on the stage are analyzed, the main source errors to the measurement uncer-tainty are given and new correction methods for those errors are proposed, Finally, two pieces of first gauge block are measured on the developed stage. Measurement results show that the standard devia tion of flatness error of first gauge block working surface is 1l nm, and that of step height is about 21
收稿日期：2012-12-04；修订日期：2013-01-30.
基金项目：国家863高技术研究发展计划重点项目（No.2008AA042409）