第20卷
第10期
2012年10月
文章编号
1004-924X(2012)102200-07
光学精密工程
Optics and Precision Engineering
陶瓷微热板阵列式可燃气体传感器
薛严冰1.2*，唐祯安2
（1.大连交通大学电气信息学院，辽宁大连116028 2.大连理工大学电子科学与技术学院，辽宁大连116024）
Vol.20
No. 10 Oet,2012
过有限元工具对其稳态热响应特性及微加热器电极结构进行了模拟。采用常规微电子技术结合激光微加工技术，实际制作了基底厚度为100um，桥宽度为2mm的微结构，并对结构的加热功率-温度关系进行了测试。结果表明：热板具有较好的高温稳定性，1.5W加热功率可使板上平均温度达到630C。将桥式微热板作为阵列传感器的加热平台，Pd掺
体传感器。传感器在恒电压加热方式下可实现CO或CH，单一模式气体检测；阵列传感器在高、低温脉冲电压加热模式下可实现对CO和CH，两种混合气体的定量检测。
调：陶瓷徽热板；气体降列传感器；一氧化碳；甲烷；工作温度
关
键
中图分类号：TP212.1
文献标识码：A
doi:10.3788/OPE.20122010.2200
Gassensorarraybasedonceramicmicro-hotplate
forflammablegasdetection XUE Yan-bing'-2·, TANG Zhen-an
(1.School of Electrical and information Engineering,DalianJiaotong University,Dalian116028,China
2.School ofElectronic Science and Technology，Dalian
Universityof Technology,Dalian116024,China) Corresponding author,E-mail :dlryb@djtu.edu.cn
Abstract: A ceramic hotplate with the structure of suspending bridge was designed to improve the thermal stability of silicon micro hotplates. The heat transfer process of the hotplate was analyzed and the characteristics of steady-state thermal response and the electrode structure of a heater were simula ted by using the finite element method. Combined the conventional microelectronic technology and la-ser micro processing technology, the microstructures with thickness of 1oo μm and bridge width of 2 mm were produced actually and the property of power assumption verses the temperature was meas ured. The results show that the hotplate has good stability at high temperature, and the average tem perature on the ceramic hot-plate can reach 630 C when a 1. 5 W heating power is applied, By taking the ceramic hotplate as heating platform and nano-scale SnO, materials with Pd doping concentration
收稿日期：2012-05-23；修订日期：2012-07-01
基金项目：国家自然科学基金重大项目(No.61131004)；辽宁省企为博士后项目(No.94392)