第23卷第1期 2015年1月
文章编号
1004-924X(2015)01-0191-07
光学精密工程
Optics and Precision Engineering
线性测微电感的精化
石照耀*，刘吕亮
（北京工业大学机械工程与应用电子技术学院，北京100124）
Vol, 23No.1
Jan.2015
摘要：为提高测微电感传感器的测量精度，提出了基于姆霍兹线图理论设计螺线管线圈的方法，改善了螺线管线圈内轴向上磁场的分布均匀性。首先，分析了螺线管线圈模型，建立了螺线管线圈参数与轴向磁场强度分布相互关系的广义函数模型。然后，通过线圈与磁芯的尺寸确定了系统轴向磁场强度分布函数模型，结合磁芯移动区间范围设置磁场均匀度最小误差目标函数，通过对目标函数寻优得到各螺线管线圈的各项参数。最后，搭建了测微电感传感器的测试系统，测试了传感器性能。实验结果表明：与传统线隔相比，改进型螺线管线圈在100μm测量范图内的线性度由0.46%提高到0.30%。实验显示通过对不同规格的螺线管线圈进行组合，可使得螺线管内轴向上磁场强度分布均匀，从而提高了测精度。
关键调：测摄电感：电感传感器；微位移测量；螺放管线图；接触扫描测头
中图分类号：TH822TP212.13
文献标识码：A
doi;10.3788/OPE,20152301.0191
Improvementofprecisionforlinearinductancemicrometer
SHIZhao-yao'，LIULu-liang
(College of Mechanical Engineering and AppliedElectronic Technology,
BeijingUniversity of Technology,Beijing 100124,China) Correspondingauthor，E-mail:shizhaoyao@bjut.edu.cn
Abstract: To improve the performance of a micrometer inductive sensor, a design method of solenoid coils was put forward based on the theory of Helmholtz coils to improve the uniformity of the axial magnetic field of a solenoid coil. Firstly, the model of the solenoid coil was analyzed and the generalized function model between the parameter of solenoid coil and the axial magnetic field intensity distribution was established. Then, the system function model for axial magnetic field intensity distribution was determined based on the parameters of the core and coil sizes, the minimum error objective function of the uniformity for the magnetic field was set from the core moving range, and the best parameters of solenoid coil by objective function optimization were obtained. Finally, a test system for the micrometer inductive sensor was established to get its detection performance, The test results show that modified solenoid coil imiproves the linearity from 0. 42% to 0. 25% in 100 μm measurement range as compared with the original solenoid coil. It concludes that the modified solenoid coil uniforms the intensity distribution of the axial magnetic field and enhances the measurement accuracy.
Key words: inductance micrometer, inductive sensor; micro-displacemen measurement; solenoid coil;
contact scanning probe
收稿日期：2014-04-27；修订日期：2014-05-27.
基金项目：国家科技重大专项资助项目（No.2013ZX04011-071）