第19卷第4期 2011年4月
文章编号
1004924X(2011)04-0709-08
光学精密工程
Optics and Precision Engineering
Vol.19No. 4
Apr.2011
离轴非球面的计算全息图高精度检测技术
黎发志1，2，罗霄1.2，赵晶丽'，薛栋林，郑立功"，张学军
（1.中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术
重点实验室，吉林长春130033；2.中国科学院研究生院，北京100039）
摘要：为了实现离轴非球面高精度定位、光路对准及面形检验，提出了一种使用计算全息图（CGH)技术实现离轴非球面高精度光学检测的方法。将被检非球面倾斜平移后作为轴上自由曲面进行CGH补偿检测设计，从面减小了检测光路的相对口径和CGH所需补偿像差，提高了CGH检测精度。使用自行开发的CGH专用设计计算软件，设计完成的 CGH同时具有非球面检验、检测光路对准、被检非球面基准定位等多项功能。采用该方法设计（设计精度优于入/10000rms)并制作CGH对面形精度优于入/50rms的离轴非球面进行了检测，误差分析表明，其检测精度优于入/ 100，与传统null-lens方法的检测结果精确吻合。实验表明，采用该CGH可同时实现离轴非球面位置高精度定位、CGH 与干涉仪对准以及离轴非球面高精度面形检验。
关键词：计算全息图；份射光学元件加工；离轴非球面；光学检测
中图分类号：TQ171.65;O438.2
文献标识码：A
doi:10.3788/OPE.20111904.0709
Test of off-axisaspheric surfaceswithCGH
LI Fa-zhil-2,LUO Xiaol-2,ZHAO Jing-li',XUE Dong-lin',ZHENG Li-gong',ZHANG Xue-jun
(l.KeyLaboratoryofOptical SystemAdvancedManufacturingTechnology,ChangchunInstitute ofOptics,FineMechanicsandPhysics,ChineseAcademyofSciences,Changchun130033,China;
2.GraduateUniversityof ChineseAcademyofSciences,Beijing100039,China)
Abstract: A new test method based on a Computer-generate Hologram(CGH) was presented for pre-cisely testing off-axis aspheric surfaces and aligning the optics in tests. In this method, off-axis as-pheric surfaces were tilt-translated and tested as an on-axis freeform optics to minimize the wavefront compensation and to reduce the relative aperture of the test setup. A software was developed to design the CGH to implement three kinds of diffractive sections,i. e. compensating wavefront in null test, a-lignmenting the optical path by adjusting the relative position between CGH and interferometer, and projecting fiducial marks around the optics. As an example, a typical off-axis aspheric surface with a figure error less than ^/5o rms was tested in this method. Results indicate that the CGH design error is better than ^/10 000 rms and the total error is better than >/100 rms, These data agree well with the test result with null lens. The experiment also verifies the feasibility of alignment and fiducial sections and demonstrates that cross-lines projected by CGHs can be used as fiduciary to guide the alignment of
收稿日期：2010-04-19；修订日期：2010-08-06.
基金项目：国家自然科学基金重点资助项目（No.61036015）