第19卷
第6期
2011年6月
文章编号
1004-924X(2011)06-1313-07
光学精密工程
Optics and Precision Engineering
柔性双补偿杆式动镜支撑机构的设计
柳华1.2*，刘伟奇"，冯睿"，魏忠伦"，张健1.2
（1.中国科学院长春光学精密机械与物理研究所，吉林长春130033：
2.中国科学院研究生院，北京100039）
Vol. 19No. 6
Jun.2011
摘要：对红外博里叶变换光谱仪动镜支撑机构的核心部分一柔性钦链机构进行了研究。以柔性单补偿杆式机构为基体设计出一种柔性双补偿杆式机构。利用有限元分析软件Patran和Nastran对其进行了模拟计算，并和目前国内最好的柔性单补偿杆式机构进行比较。然后，根据模拟计算得出的结构参数加工出简易实物，并对实物进行了实验测试及误差分析。结果表明，在模拟计算中，柔性双补偿杆式机构使动镜的垂直耦合位移缩小为柔性单补偿杆式机构的6.8%；误差分析认为柔节的长度公差是引起动镜垂直耦合位移的一个重要因索，因此，若要提高动镜支择机构的精度，加工时必须严格控制与柔节相关的尺寸公差。
关键调：红外傅里叶安换光谱仪；迈充尔迅干涉仪；动镜机构；柔性铰键机构；有限元分析；垂直揭合位移
中图分类号：TH744.1;TH703
文献标识码：A
doi; 10. 3788/OPE. 20111906. 1313
Design of flexible-supporting mechanism
withdoublecompensationrodsformovingmirror LIU Hua'-2- ,LIU Wei-qi',FENG Rui', WEI Zhong-lun',ZHANG Jian'-2(1.Changchun Institute of Optics,Fine Mechanics and Physics,
Chinese Academy of Sciences,Changchun 130031,China;
2.GraduateUniversity of Chinese Academy of Sciences,Beijing 100039, China)
Correspondingauthor,E-mail.liuhuao898@sohu.com
Abstract: A flexible mechanism which was considered as a key component of the moving mirror sup porting in a Michelson interferometer based Fourier-transform spectrometer was researched, The flexi ble mechannism with double compensation rods was created on the basis of the flexible mechannism with a single compensation rod. By use of the finite element analysis softwares PATRAN and NAS-TRAN, the mechanism was simulated and the corresponding results were compared with the best the oretical calculation of the flexible mechannism with the single compensation rod. A simplified model was also fabricated according to the structral specifications from simulation calculation, Furthermore, the model was also tested and error analysis was conducted, It is shown that the vertical coupling dis-placement of the moving mirror introduced by this flexible mechannism with double compensation rods has been decreased by 93. 2%. The results of error analysis indicate that the length tolerence of the
收稿日期：2010-10-14；修订日期：2010-11-17
基金项目：国家自然科学基金重点资助项目（No.60538020)；中国科学院创新工程资助项目