第21卷第11期 2013年11月
文章编号
1004-924X(2013)11-2829-07
光学精密工程
Optics and Precision Engineering
Vol. 21No.11
Nov.2013
热扰动条件下投影物镜温度响应的高精度建模
秦硕1.2*，巩岩"，于新峰"，袁文全"，彭海峰"，杨怀江1（中国科学院长春光学精密机械与物理研究所，吉林长春130021；
空军航空大学，吉林长春130021）
摘要：针对投影物镜温度控制系统具有多重扰、多时滞和时间常数较大等问题，搭建了投影物镜温控实验平台；研究了实验平台的结构、激励信号设计、数据预处理方法和建模算法，建立了超高精度温度响应模型。首先，考患光刻机对震动和洁净度的严格要求，设计了远距离串级水冷控制系统；进行了物镜温度的阶跃响应实验，采用两点法建立了物镜的温度响应传递函数（粗建模）。然后，根据获得的物镜阶跃响应传递函数，设计二位式伪随机辨识输人信号的参数，并采用分段线性化方法对输入输出数据进行预处理。最后，设计选代最小二乘算法，辨识得到物镜的ARMAX温度响应模型（精建模）。基于该模型的物镜温控实验结果表明：在环境温度波动幅值达0.6℃并加人3W的热扰动条件下，物镜温度稳态误差控制在士0.001℃以内，满足光刻机对投影物镜的超高精度温度控制要求。
调：投影物镜；热扰动；伤随机信号；系统辨识；温度控制
关键
中图分类号：TN305.7
文献标识码：A
doi:10, 3788/(OPE. 20132111. 2829
Highaccuracytemperatureresponsemodelingof projection lens under thermal disturbance
QIN Shuol-2, GONG Yan',YU Xin-feng',YUAN Wen-quan',PENG Hai-feng",YANG Huai-jiang
(Key Laboratory of Optical System Aduanced Manufacturing Technology,
ChangchunInstituteof Optics,Fine
Mechanics and Physics,ChineseAcademy of Sciences,Changchun 130021,China;
AviationUniversityofAirforce,Changchun130021,China) Correspondingauthor，E-mail:qinshuo666@163.com
Abstract: In consideration of the repetitive disturbance, time lag and a larger time constant in a tem perature control system for the projection lens, a temperature control experimental platform of projec tion lens was built. The structures, data preprocessing method and modeling algorithm for the experi-mental platform were researched, and a high precision temperature response model was established. Firstly, Taking into account the request of a lithographic machine for stringent vibration and cleanli-ness, the long-distance range cascade water cooling control system was designed. Then, the step re-sponse experiment of projection lens on the temperature was carried on, and the temperature response transfer function of projection lens was established with the two-point method(coarse model). Fur thermore, pseudo random input signal was designed on the basis of the transfer function, and the in-
收稿日期：2013-07-05；修订日期：2013-09-10.
基金项目：国家02专项基金资助项目（No.2009ZX02005）