SJ/T 10583-2016代替 SJ/T 10583—1994
气体质量流量控制器通用技术条件
General specification for gas mass flow controller
2016 -09 - 01实施
2016-04 -05 发布
目次
前言.................................................1
1范围.........................................................1
2规范性引用文件...................................................1
3术语和单位..............................................................1
4原理...........................................................4
5分类..........................................................................5
6 要求............................................5
7试验方法................................................................8
8检验规则.....................................................................14
9标志、包装、运输、贮存................................................16
本标准按照GB/T1.1—2009给出的规则起草。