GB/T 37466-2019
氮化镣激光剥离设备
Laser lift-off equipment used for GaN
2019-06-04 发布
2019-10-01 实施
前言.........................................1
1范围..........................................1
2规范性引用文件.....................................1
3术语和定义.......................................1
4产品分类和标记.....................................2
4.1分类.......................................2
4.2型号标记.....................................3
5工作条件........................................4
5.1电源.......................................4
5.2环境温度.....................................4
5.3相对湿度...................................  4
5.4大气压力 ................................4
5.5洁净室等级....................................4
5.6电磁干扰.....................................4
5.7地基振动要求...................................4
6 要求............................................4
6.1    外观.........................................4
6.2激光要求........................................4
6.3扫描台.........................................5
6.4整机性能........................................5
6.5电气要求........................................5
6.6控制装置........................................5
6.7软件要求........................................6
6.8电磁兼容........................................6
6.9    噪声.........................................6
6.10平均无故障时间....................................6
6.11安全要求.......................................6
7检测方法...........................................7
7.1外观检査........................................7
7.2激光检査........................................7
7.3扫描台检査.......................................8
7.4整机性能检测......................................9
7.5电气检査........................................9
7.6控制装置检査.....................................10
7.7软件检测.......................................10
7.8电磁兼容试验....................................10
7.9噪声测试.......................................10
7.10平均无故障时间验证.................................10
7.11安全要求检査....................................10
8检验规则..........................................11
8.1检验分类.......................................11
8.2鉴定检验.......................................11
8.3 出厂检验......................................11
8.4判定规则.......................................11
9标志、包装、运输和贮存...................................12
9.1 标志........................................12
9.2包装.........................................12
9.3运输.........................................13
9.4贮存.........................................13