第18卷第5期 2010年5月
文章编号
1004-924X(2010)05-1054-06
光学精密工程
Optics and Precision Engineering
Vol.18No.5
May2010
微型膜结构全光纤珀干涉高温传感器
朱涛12，柯涛"，饶云江1,2，段德稳"，徐敏
（1.重庆大学光电工程学院光电技术及系统教育部重点实验室，重庆400044；
2.电子科技大学通信与信息工程学院宽带光纤传输及通信网
络技术教育部重点实验室，四川成都610054）
摘要：制作了一种微型膜结构的全光纤在线珀干涉式高温传感器。该传感器是在单模光纤端面依次熔接一段大芯径空芯光纤和一段研磨的多模光纤膜片而构成的，因此，温度引起的珀腔光程差改变量由空芯光纤的热影胀和温度引起腔内压强改变从而改变膜片的扰度两部分组成，从而使相同温度变化下传感器的光程差变化量更大，分辨率更高。实验 00 约为0,9967，且滞回小，重复性好。这种膜结构的全光纤法珀干涉式高温传感器因其体积小，温度分辨率高，将在多点高温测量领域有好的应用前景。
关键调：光纤传高；高温传感器；法珀干涉仅；膜结构
中图分类号：TN253
文献标识码：A
doi;10, 3788/OPE, 20101805. 1054
Miniatureall-fiberFabry-Perotinterferometric hightemperaturesensorbasedonathinfilm
ZHU Taol-, KE Tao', RAO Yun-jiang'-2, DUAN De-wen', XU Min
(1.KeyLaboratoryof Optoelectronic Technologyand Systems,
MinistryofEducation，ChongqingUniversity，Chongqing400044,China; 2.KeyLaboratoryofBroadbandOpticalFiberTransmission&Communication NetworkTechnologies,MinistryofEducation,UniversityofElectronic
Science &Technology of China,Chengdu 610054, China)
Abstract:Aminiature all-fiber Fabry-Perot high temperature sensor with a thin film is presented.The sensor is fabricated by splicing a hollow fiber with a grinded multimode fiber thin film on the end of a single mode fiber. The change of the optical path difference of the Fabry-Perot cavity are composed of two parts, the therrtal'expansion of the hollow fiber and the deflection of the thin film induced by temperature change. As the optical path difference of the sensor is langer than those of common sen-sors at the same temperature,it can offer a higher sensitivity. A temperature measurement experiment is carried out,results show that the sensor has a linearity of o. 996 7, sensitivity of 1. 029 nm/C and the resolution of measuring system about 1. 5 C. It is concluded that the miniature all-fiber Fabry-Per
收稿日期：2009-06-25；修订日期：2009-09-16，
基金项目：国家自然科学基金资助项目（No，60807019；No.60537040)；重庆市自然科学基金资助项目（No.
CSTC2008BB2165）；新世纪优秀人才支持计划资助项目（No，NCET-08-0602）