第19卷第8期 2011年8月
文章编号
1004-924X(2011)08-1736-07
光学精密工程
Optics and Precision Engineering
凸面光栅成像光谱仪的干涉法装调
刘玉娟1,2*，巴音贺希格1，崔继承1.2，唐玉国1
(1.中国科学院长春光学精密机械与物理研究所，吉林长春130033；
2.中国科学院研究生院，北京100049）
Vol.19No.8
Aug.2011
摘要：研究了Offner凸面光栅成像光谱仪同心分光系统的装调方法。将双光束干涉基本原理与同心光学系统基本特点相结合，提出了适用于Offner凸面光栅成像光谱仪的干涉装调法。该方法首先对凸面光栅成像光谱仪同心光学系统的两个回球面反射镜进行同心装调，由于单个球面反射镜的高焦量难以调整至零，故引人相对离焦使两个反射镜的离焦量相等，从而实现两镜同心。另外，考虑无法用同一-套凹球面补偿镜来检测凸球面，故提出采用谱图直读法来确定凸面光栅位置，实现了Offner凸面光栅成像光谱仪的高精度同心装调。实验结果表明，经干涉法装调后，分光系统主镜和三镜的球心距离可以达到几个纳米基至更高。
关键调：成像光谱仅；吕面光栅；千涉装调法；谱图直读法
中图分类号：TH744.1
文献标识码：A
doi;10.3788/OPE. 20111908.1736
Interferometric alignment of
imagingspectrometerswithconvexgratings LIU Yu-juan-·,Bayanheshig',CUI Ji-cheng'-2,TANG Yu-guo(1.Changchun Institute of Optics,FineMechanics andPhysics, ChineseAcademyofSciences,Changchun130033,China
2.GraduateUniversity ofChineseAcademy of Sciences，Beijing100049,China)
*Correspondingauthor,E-mail;ruliuyujuan@163.com
Abstract: How to align the spectral systems of Offner concentric imaging spectrometers with convex gratings was researched, Based on the principle of dual-beam interference and characteristics of con centric systems,an interferometric alignment method for the Offner imaging spectrometers with con-vex gratings was proposed. With this method ,the primary and tertiary mirrors of Offner imaging spectrometers were aligned firstly. As the defocus of single spherical mirror could not be aligned to ze ro,the relative defocus was introduced to adjust the defocuses of the two mirrors to achieve the con centricity. Furthermore,because the concave compensator could not test the convex mirror,the convex grating was arranged according to reading spectrogram directly to complete concentric alignment with high precision. The result indicates that the interferometric alignment can achieve the distance be tween centers of the primary and tertiary mirrors of Offner imaging spectrometers up to several nano-
收稿日期：2010-09-28；修订日期：2011-01-11
基金项目：国家创新方法工作专项资助项目（No.2008IM040700)；吉林省科技支撑计划资助项目（No.20106011）