第21卷第12期 2013年12月
文章编号1004-924X(2013)12-3001-07
光学精密工程
Optics and Precision Engineering
Vol. 21No. 12
Dec.2013
偏振正交性对偏振相移干涉检测精度的影响
宣斌，宋淑梅
（中国科学院长春光学精密机械与物理研究所，吉林长春130033）
摘要：为了提高线偏振相移干涉检测的精度，分析了参考光和测试光的偏振方向正交性对该项检测技术的影响。分析了线偏振相移干涉的原理，提出偏振非正交引起的检测误差与波像差有关，且检测误差峰谷值与测试光和参考光振幅之比以及偏振非正交量成正比。讨论了偏振非正交产生的原因，认为测试光在被检元件表面的折射或者反射都有可能引起偏振非正交。针对不同被检元件，给出了减少偏振非正交的几种方法，包括合理镀膜、选择合理人射角偏振方向等。通过Skip-Flat检测对理论分析进行了验证。结果显示，对于人射角为45"的检测光路，偏振正交性引人的检测误差呈现与条纹一致的分布，峰谷值为0.1741入，这与理论分析相吻合。文章指出，进行偏振相移干涉检测时，需要针对不同的被检
元件进行分析，以确保偏振非正交产生的检测误差能够满足技术要求。关键·词：光学检测；偏振相移干涉；偏振正交性；波像差；Skip-Flat检测
中图分类号：0436.1
文献标识码：A
doi;10.3788/OPE.20132112.3001
Influenceofpolarizationdirectionorthogonalityon precision of polarization phase shifting interferometry
XUAN Bin',SONG Shu-mei
(ChangchunInstituteof Optics，FineMechanicsandPhysics， ChineseAcademy of Sciences,Changchun130033,China)
*Correspondingauthor，E-mailrbjsnt@sina.com
Abstract: The influence of polarization direction orthogonality on Polarization Phase Shifting Interfer ometry(PPSI) was analyzed to improve its measurement precision. Based on the analysis of PPSI prin-ciple, it points out that the measurement error is a function of Optical Path Difference(OPD) and the PV of measurement error is proportionai to the non-orthogonality and the ratio of amplitudes of test beam to reference beam. The polarization non-orthogonality can be introduced by the reflection or re-fraction on a surface. Then several approaches were recommended to depress the non-orthogonality, such as proper coatings, incident angles and polarization directions, A configuration of Skip-Flat test with incident angle of 45° was set up. It shows that the distribution of measurement error is coincident with that of OPD. Moreover,the measurement error is O.174 13 (PV), which is in agreement with that of the theoretical analysis. Finally, the paper suggests that it is necessary to analyze individually each of the component under the test for making sure the measurement precision.
收稿日期：2013-08-30；修订日期：2013-10-16.
基金项目：国家863高技术研究发展计划资助项目