第21卷第1期 2013年1月
文章编号
1004-924X(2013)01-0131-06
光学精密工程
Optics and Precision Engineering
压电旋转驱动器制作及性能测试温建明，马继态，曾平，，张忠华，阐君武，程光明（浙江师范大学精密机械研究所，浙江金华321004）
Vol. 21No. 1
Jan.2013
摘要：提出了通过控制正压力来改变摩擦力的方案，进而研制了一种以压电叠堆为动力转换元件的新型压电旋转驱动器。采用两个驱动用压电登堆对称布置的方式设计了该旋转驱动器结构，探讨了旋转驱动器运动机理，制作了压电旋转驱动器试验样机并对其进行了试验测试。试验结果表明，该驱动器输出步长线性度较好，当驱动电压为10V、频率为 2Hz时，驱动器旋转步长为20urad。分析了驱动器输出稳定性，针对存在的间题提出通过施加控制系统来有效提高不同起始位置驱动器的运动稳定性。对试验结果进行误差分析，找出了产生误差的原因，为驱动器的进一步优化设计提供了参考。研究证明了该压电施转驱动器设计方法的可行性，利用该方法可以制作出结构简单，体积小，适合在微驱动领域中应用的驱动器。
关键词：压电驱动器；旋转驱动器；压电叠堆；慎性驱动
中图分类号：TM384；TH703.8
文献标识码：A
doi:10. 3788/OPE.20132101, 0131
Machiningandfunctional testingofpiezoelectricrotaryactuator WEN Jian-ming, MA Ji-jie, ZENG Ping', ZHANG Zhong-hua, KAN Jun-wu, CHENG Guang-ming
(InstituteofPrecisionMachinery，ZhejiangNormalUniversity，Jinhua321004,China)
Correspondingauthor，E-mail;zengping321@163.com
Abstract: A new piezoelectric inertial rotary actuator by taking piezoelectric stacks as the power con verters was proposed based on controlling the normal pressure to regulate the frictional force. By ar-ranging two piezoelectric stacks symmetrically,the structure of the piezoelectric rotary actuator was designed, and its motion mechanism was explored. A prototype of piezoelectric rotary actuator was developed and the experimental test on the actuator was performed. Experimental results show that the actuator is excellent in linearity of output step and its rotation step is 2o μrad when the square wave is 1o V and the frequency is 2 Hz. The stability of the actuator was analyzed and an extra control system was added to overcome the shortcoming in the step stability at different start points. The error sources were obtained by analysis on the test data, which provides references for further optimization of the actuator. Research in this paper proves the feasibility of the design method for piezoelectric ro tary actuators. It can be used in design of piezoelectric rotary actuators with simple structures, small volumes for micro-driving applications.
Key words: piezoelectric actuator; rotary actuator; piezoelectric stack; inertial driving
收稿日期：2012-05-21；修订日期：2012-07-02.
基金项目：国家自然科学基金资助项目（No.51175478，51205369)；浙江省公益性技术应用研究计划资助项目（No
2011C23040)；渐江省自然科学基金资助项目（No.Y1110529，Y4110315）