第20卷第6期 2012年6月
文章编号1004-924X(2012)06-1265-07
光学精密工程
Optics and Precision Engineering
压电陶瓷微动台的复合控制
王俐1,2,3*，饶长辉1.2，饶学军1,2
（1.中国科学院光电技术研究所，四川成都610209
Vol.20No.6
Jun.2012
2.中国科学院自适应光学重点实验室，四川成都610209；3.中国科学院研究生院北京100049）
摘要：压电陶瓷微动台的迟滞非线性严重影响其动态定位精度，为了解决这一问题，采用一种改进的PI模型对微动台的迟滞非线性进行了建模。为了提高传统PID算法对压电陶瓷微动台的动态定位性能，将改进的PI模型与传统PID算法组合构成前馈复合控制算法，并进行了微动台的慢速与快速动态定位实验。结果表明，对同频曲线定位时，前馈PID复合算法的最大误差为传统PID算法的40%左右，平均误差为传统算法的20%30%左右；对多额曲线定位时，前馈PID 复合算法的最大误差和平均误差为传统PID算法的33%左右。数据表明前馈PID复合算法的动态定位性能明显优于传统PID算法。
关键调：压电陶瓷；迟滞特性；改进的PI迟滞模型；前馈控制；动态定位精度
中图分类号：TP273;TN384
文献标识码：A
doi;10.3788/OPE. 20122006.1265
Feed-forwardcontrolofpiezoelectricceramicpositioningstage
WANG Lil-2.3-,RAO Chang-huil-,RAO Xue-jun'-2
(1.InstituteofOpticsandElectronics,ChineseAcademyof Sciences,Chengdu610209,China; 2.KeyLaboratory onAdaptiveOptics,ChineseAcademy ofSciences,Chengdu610209,China
3.GraduateUniversityofChineseAcademyofSciences,Beijing100049,China)
Correspondingauthor，E-mail;wangli9613@126.com
Abstract: As the nonlinear hysteresis of a piezoelectric ceramic positioning stage affects its dynamic positioning precision badly, this paper proposes a model for the piezoelectric ceramic hysteresis based on a modified PI hysteresis model. In order to improve the dynamic positioning precision of the piezoe-lectric ceramic positioning stage based on traditional PID algorithm, the feed-forward control is consti-tuted with the modified PI inverse hysteresis model and a traditional PID, and the experiments on slow speed and high speed positionings are performed. Experimental results show that the maximal error and mean error of the feed-forward controller are 40% and 20%30% that of traditional PID algo rithm for tracking single frequency trajectory. For multi-frequency trajectory tracking, the feed-for-ward controller has better dynamic control effect, and both maximal error and mean error are almost 33% that of traditional one. These data indicate the availability of the feed-forward control algorithm.
收稿日期：2012-02-10；修订日期：2012-03-05
基金项目：国家自然科学基金重点项目（No.11178004)