第20卷第3期 2012年3月
1004-924X(2012)03-0514-06
文章编号
光学精密工程
Optics and Precision Engineering
Vol.20No.3
Mar.2012
谱学显微光束线光斑水平漂移分析与检测
马磊1,2，卢启鹏1*，彭忠琦1
（1.中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室，吉林长春130033；
2.中国科学院研究生院，北京100039）
摘要：为提高上海光源搭建的国内首条软X射线谱学显微光束线站的整体性能，分析了其分光装置一变包含角平面光栅单色仪在波长扫搞过程中影响谱学显微光束线光斑水平漂移的各个因素，推导出了各因素与光斑水平漂移的传通关系，并结合具体要求进行了误差分配。针对光斑水平角漂移重复精度的检测，采用自准直原理，构建了测试系统。利用该系统，完成了谱学显微光束线站光斑水平漂移重复精度的离线检测，其结果为0.67"，满足设计指标1"的要求。对安装调试后的束线进行了总体性能测试，结果均满足谱学显微设计和使用要求。由此表明，提出的对谱学显微光束线光斑水平漂移误差来源的分析及检测方法，有效保证了束线性能的实现。
调：变包含角平面光栅单色仪；谱学星微光来线；光延水平漂移；误差分析
关键
中图分类号：TH744.1,TB92
文献标识码：A
doi;10.3788/OPE.20122003.0514
Analysisandtestoflightspottransversal transferofspectromicroscopicbeamline
MA Leil-2,LU Qi-peng'',PENG Zhong-qi
(l.StateKeyLaboratoryofAppliedOptics,ChangchunInstituteofOptics,FineMechanics
andPhysics，ChineseAcademyofSciences，Changchun130033，China;
2.GraduateUniversityofChineseAcademyofSciences,Beijing100039,China)
*Correspondingauthor,E-mail:luqipeng@126.com
Abstract: With the aim to improve the unified performance of the first soft X-ray spectromicroscopic beamline built in Shanghai Synchrotron Radiation Facility(SSRF), This paper analyzes the main fac-tors that effect the light spot transversal transfer of the spectromicroscopic beamline during wave-length scanning by a variable-included-angle plane grating monochromator. It deduces the relation be tween various factors and light spot transversal transfer, and solves the error distribution of the sys-tem to ensure the performance of the beamline, A test system for the repeatability of light spot trans-versal transfer is built by auto collimation principle and the off-line testing of the light spot transversal transfer is finished by using this test system, The result shows that the repeatability is O.67", which satisfies the technical requirement of 1". The unified performance for the beamline is tested after it is assembled, Obtained results meet the requirements of design and application, and prove the effective-
收稿日期：2011-03-08；修订日期：2011-04-15
基金项目：国家自然科学基金资助项目（No.11079035)；应用光学国家重点实验室开放基金资助项目（No.
O9Q33FQ091)