第19卷第2期 2011年2月
文章编号1004-924X(2011)02-0221-07
光学精密工程
Optics and Precision Engineering
Vol.19No.2
Feb.2011
纳秒、皮秒和飞秒激光脉冲对材料表面的改性
TRTICAMS',GAKOVICBM',RADAKBB',BATANID?,TARASENKOVF3 PETROVICS.STASICJ'MILOVANOVICD'.KRMPOTA，JELENKOVICB(1. VINCA Institute of Nuclear Sciences, University of Belgrade, P. O. BOX 522, 11001 Belgrade, Serbia;
2.Universita degli Studi di Milano Bicocca,Piazza della Scienza 3,20126Milano,Italy
3.High CurrentElectronics InstituteSBofRAS,634055Tomsk，Russia;
4.Institute of Physics,P.O.BOX 57,11001Belgrade,Serbia)
摘要：对基体材料镍铁合金600和多层TiAIN/TiN涂层的激光表面改性在基础研究和实际应用中有着很好的前景。本文观察了由超短脉冲(fs和ns)和短脉冲(ns)激光器引起的镉镍铁合金600和TiAIN/TiN镀层的表面变化。结果显示，3种激光都能使靶面发生形态改变，超短脉冲的破坏轮席更为清晰，与ps激光脉冲相比，fs激光脉冲能产生更严重的破坏。与产生半球体形状的ps激光束相反，fs激光脉冲产生的破坏斑是圆锥形的。另外，ns脉冲辐照时热效应占支配地位，且所有的辐照都伴随着等离子体。
关键词：纳秒脉冲；皮秒脉冲；飞秒脉冲；Inconel600镀层；TiAIN/TiN键层；激光改性
中图分类号：TG156.99
文献标识码：A
doi;10.3788/OPE.20111902.0221
Material surface modification byns,ps and fs laser pulses TRTICA MS',GAKOVICB M',RADAKBB',BATANID',TARASENKO V F", PETROVIC S'STASICJ',MILOVANOVIC D’,KRMPOTA',JELENKOVIC B
(1.VINCAInstitute of Nuclear Sciences,University of Belgrade,
P.O.BOx522，11001Belgrade，Serbia;
2.UniversitadegliStudidiMilanoBicocca,Piazza dellaScienza3,20126Milano,Italy;
3.HighCurrentElectronicsInstituteSBofRAS，634055Tomsk，Russia:
4.Instituteof Physics,P.O.BOX57,11001Belgrade,Serbia)
Abstract: The laser surface modifications of a bulk material Inconel 6o0 and a multilayered titanium-a-luminium-nitride/titanium-nitride(TiAIN/TiN) coating are of great interest for fundamental and prac tical aspects. Observation of surface changes of the Inconel 6oo and TiAIN/TiN induced by ultra-short(fs and ps) and short (ns) lasers is considered. It is shown that all laser systems can stimulate mor-phological changes at the target surface,and the irradiation with ultra-short pulses results in a better definition of the damage. Fs laser pulses can produce a sharper destruction in comparison to the ps pulses and it gives the conical cross section of the crater, which is in contrast to the semispherical
收稿日期：2010-10-08；修订日期：2010-10-30.
基金项 :Supported by the Ministry of Science and Technological Development of the Republic Serbia and “Super
Intense Laser-Matter Interactions"- SILMI Project, European Scientific Foundation