第19卷第8期 2011年8月
文章编号
1004-924X(2011)08-1763-08
光学精密工程
Optics and Precision Engineering
Vol.19No.8
Aug.2011
离轴抛物镜检测中调整误差对波前畸变的影响
李俊峰，，宋淑梅
（中国科学院长春光学精密机械与物理研究所中国科学院光学
系统先进制造技术重点实验室，吉林长春130033）
摘要：对离轴非球面在光学加工和后期装调阶段的光学检测进行了研究，分析了检测过程中调整误差对波前畸变的影响。以加工率径为10000mm、二次曲面系数为一1、口径为500mm、离轴量为425mm的高轴物面为例，建立了各个调整参数对波前畸变影响的物理模型及数学模型，调整误差主要包括俯仰与高低、偏摆与离轴量及绕其子光轴策转3组参数。应用matlab软件对调整误差对波前畸变的影响进行了伤真分析，对相应的仿真结果进行了实验验证。结果显示，仿真与实验结果一致性很好，证明了理论模型的正确性，分析得到的相应结论适用于所有离轴非球面镜的调整误差分析。
关键
词：离轴非球面；光学检测；波前时变；调整误差
中图分类号：TH703;TQ171.65
文献标识码；A
doi;10.3788/OPE.20111908.1763
Influence of adjustment error on wavefront
aberration in off-axis paraboloid test
LI Jun-feng',SONG Shu-mei
(KeyLaboratoryof OpticalSystemAduancedManufacturingTechnology，
Changchun Institute of Optics,Fine Mechanics and Physics, ChineseAcademyofSciences，Changchun130033，China)
Correspondingauthor,E-mail;ljf22o@sohu.com
Abstract: Optical tests for the off-axis aspherics in optical processing and optical assembling were re searched and the effect of adjustment errors on the wavefront aberration was analyzed. By taking an off-axis aspherics with the radiu of 10 000 mm,quadratic surface coefficient of 1,diameter of 500 mm and the lateral displacement of 425 mm for an example, the physical model and mathematical model to describe the relationship between the adjustment parameters and the wavefront aberration were esta-bished. The adjustment parameters included the pitch and high-low errors, beat and off-axis distance errors,and the rotating parameters around the secondary optical axis. The matlab software was used to simulate the influence of the wavefront aberration on the adjustment errors, Then, the experiments were performed to examine the simulation results. It shows that the the simulation results are well concident with the experiment ones, which proves the theory model in correct. The obtained results
收稿日期：2010-12-10；修订日期：2010-12-28.
基金项目：中国科学院三期知识创新工程资助项目